Application Semiconductor industry Optical temperature measurement in crystal growth and wafer processing

Application note Semiconductor industry Products and processes in the semiconductor industry The semiconductor industry is a rapidly growing market with increasing demands on the performance and production costs of its products, such as photovoltaic cells, microchips, LEDs and lasers. The process chains for producing these products include the extraction of a pure semiconductor substrate with a crystal lattice that is as flawless as possible and its further processing. This further processing includes the thermal treatment and coating of wafers. ature ranges must be observed in order to avoid...

Heat treatment RTP (Rapid Thermal Processing) PLD (Pulsed Laser Deposition) MBE (Molecular Beam Epitaxy) Process requirements Semiconductor wafers require a spectral sensitivity of the pyrometer below the band gap High-intensity lenses enable the measurement of low process temperatures Pulsed laser radiation requires blocking filters and sensors that are not affected by the laser Small substrates require high-resolution lenses with a small measuring field diameter Coated substrates require a short-wave spectral sensitivity of the pyrometer Changing coating materials require large measuring spans...

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