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Semiconductor Device Test

Semiconductor Device Test
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Semiconductor Device Test

Product catalog summary
General Information
Introduction: This document outlines the necessary hardware and software configurations for running example application programs using Series 2600 System SourceMeter Instruments. These instruments can source and measure current and voltage simultaneously, suitable for testing two-terminal devices like resistors and capacitors, as well as three- and four-terminal devices such as BJTs and FETs, which may require multiple SMU channels.

Two-terminal Device Tests
Introduction: This section covers testing of two-terminal devices.
Voltage Coefficient Tests of Resistors: Discusses test configuration, calculations, and measurement considerations, with example programs and typical results.
Capacitor Leakage Test: Details test configuration, leakage resistance calculations, and measurement considerations, including example programs and results.
Diode Characterization: Covers test configuration, measurement considerations, and example programs using different sweep methods.

Bipolar Transistor Tests
Introduction: Focuses on testing bipolar transistors.
Common-Emitter Characteristics: Describes test configuration and measurement considerations, with example programs and results.
Gummel Plot: Provides test configuration and example program details.
Current Gain: Discusses gain calculations and test configurations for different methods, with example programs and results.

FET Tests
Introduction: Addresses testing of FETs.
Common-Source Characteristics: Includes test configuration and example program details.
Transconductance Tests: Describes test configuration and provides an example program.
Threshold Tests: Covers test configurations for different methods and example programs.

Using Substrate Bias
Introduction: Explains the use of substrate bias in testing.
Substrate Bias Instrument Connections: Details connections and setup for substrate biasing.
Source-Measure Unit Substrate Biasing: Provides test configurations and example programs.

High Power Tests
Introduction: Focuses on high power testing.
High Current and Voltage Tests: Describes test configurations and example programs for high current and voltage measurements.

Appendix A - Scripts: Contains scripts for various programs discussed in the guide, providing detailed coding examples for implementing the tests.
Overview: The document provides guidance on using Series 2600 System SourceMeter instruments for testing discrete components, emphasizing the importance of aligning the instrument's source and measurement ranges with testing specifications.
Test Fixture Requirements: A test fixture, either metallic or nonmetallic, is used for external test circuits and must meet safety requirements, especially when hazardous voltages are present. Metallic enclosures must be grounded, while nonmetallic ones must be made of materials suitable for flammability, voltage, and temperature conditions.
Safety Precautions: The test fixture must completely enclose the test circuit and be electrically isolated. An interlock switch is required for safety when the fixture lid is opened, and the interlock pin on certain models can be used for safety control.
Software and Programming: Series 2600 instruments use the Test Script Processor (TSP) for scripting, accessible via the GPIB port. Scripts can be created and managed using the Keithley Test Script Builder (TSB). Other software options include LabTracer® 2 and the Automated Characterization Suite (ACS).
Connections and Cabling: High-quality cabling is recommended for connections. Local sensing is typically used, but four-wire remote sensing is advised for low impedance circuits to ensure accuracy.
Data Graphing: Data from tests can be graphed by copying it from the TSB Instrument Console to a spreadsheet program like Excel, allowing for visualization of the device under test (DUT) characteristics.
Additional Information: The document includes contact information for Keithley Instruments' offices worldwide and notes that specifications are subject to change.
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Catalog excerpts

Semiconductor Device Test-1

System SourceMeter® Instruments Semiconductor Device Test Applications Guide Contains Programming Examples

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Semiconductor Device Test-2

this book, visit Keith ley's A GREATER MEASURE OF CONFIDENCE

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Semiconductor Device Test-3

Table of Contents Section 1 General Information 1.1 Common-Emitter Characteristics . . . . . . . . . . 3.3.1 Test Configuration . . . . . . . . . . . . . . . 3.3.2 Measurement Considerations . . . . . . . . . 3.3.3 Example Program 4: Common-Emitter Characteristics . . . . . . . 3.3.4 Typical Program 4 Results . . . . . . . . . . . 3.3.5 Program 4 Description . . . . . . . . . . . . Gummel Plot . . . . . . . . . . . . . . . . . . . . . 3.4.1 Test Configuration . . . . . . . . . . . . . . . 3.4.2 Measurement Considerations . . . . . . . . . 3.4.3 Example Program 5: Gummel Plot . . . . . . 3.4.4...

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Semiconductor Device Test-4

Common-Source Characteristics . . . . . . . . . . 4.3.1 Test Configuration . . . . . . . . . . . . . . . 4.3.2 Example Program 9: Common-Source Characteristics . . . . . . . . . . . . . . . . . 4.3.3 Typical Program 9 Results . . . . . . . . . . . 4.3.4 Program 9 Description . . . . . . . . . . . . 4.3.5 Modifying Program 9 . . . . . . . . . . . . . Transconductance Tests . . . . . . . . . . . . . . . 4.4.1 Test Configuration . . . . . . . . . . . . . . . 4.4.2 Example Program 10: Transconductance vs. Gate Voltage Test . . . . . . . . . . . . . . 4.4.3 Typical Program 10 Results . . . . . . ....

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Semiconductor Device Test-5

Program 11. Threshold . . . . . . . . . . . . . . . . A-52 Program 11A. Threshold (Search) . . . . . . . . . . . A-52 Program 11B. Threshold (Fast) . . . . . . . . . . . . A-56 Section 5. Using Substrate Bias . . . . . . . . . . . . . . Program 12. Substrate Current vs. Gate-Source Voltage (FET ISB vs. VGS) . . . . . . . . . . . . Program 13. Common-Source Characteristics with Substrate Bias . . . . . . . . . . . . . . Program 14. Common-Emitter Characteristics with Substrate Bias . . . . . . . . . . . . . . Section 6. High Power Tests . . . . . . . . . . . . . . . . A-78 Program 15. High Current...

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Semiconductor Device Test-7

List of Illustrations Section 1 General Information Section 5 Using Substrate Bias Figure 1-1. Typical system configuration for applications . . 1-1 Figure 5-1. TSP-Link connections for two instruments . . . . Figure 5-2. TSP-Link instrument connections . . . . . . . . Figure 5-3. Program 12 test configuration . . . . . . . . . . Figure 5-4. Program 12 typical results: ISB vs. VGS . . . . . . Figure 5-5. Program 13 test configuration . . . . . . . . . . Figure 5-6. Program 13 typical results: Common-source characteristics with substrate bias . . . . . . . . . . . . Figure 5-7. Program 14 test...

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Semiconductor Device Test-8

Section 1 General Information 1.1 Introduction The following paragraphs discuss the overall hardware and software configurations of the system necessary to run the example application programs in this guide. 1.2 Hardware Configuration 1.2.1 System Configuration Figure 1-1 shows the overall hardware configuration of a typical test system. The various components in the system perform a number of functions: Series 2600 System SourceMeter Instruments: System Source­­ Meter instruments are specialized test instruments capable of sourcing current and simultaneously measuring voltage, or sourcing current...

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Semiconductor Device Test-9

Section 1 General Information on the digital I/O port on the Models 2601 and 2602 System SourceMeter instruments is not suitable for control of safety circuits and should not be used to control a safety interlock. The Interlock pin on the digital I/O port for the Models 2611, 2612, 2635, and 2636 can be used to control a safety interlock. Computer: The test programs in this document require a PC with IEEE-488 (GPIB) communications and cabling. Software: Series 2600 System SourceMeter instruments each use a powerful on-board test sequencer known as the Test Script Processor (TSP™). The TSP is...

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Semiconductor Device Test-10

Specifications are subject to change without notice. All Keithley trademarks and trade names are the property of Keithley Instruments, Inc. All other trademarks and trade names are the property of their respective companies. Keithley Instruments, Inc. ■ 28775 Aurora Road ■ Cleveland, Ohio 44139-1891 ■ 440-248-0400 ■ Fax: 440-248-6168 ■ 1-888-KEITHLEY ■ www.keithley.com Belgium Sint-Pieters-Leeuw Ph: 02-3630040 Fax: 02-3630064 [email protected] www.keithley.nl china Beijing Ph: 8610-82255010 Fax: 8610-82255018 [email protected] www.keithley.com.cn finland Espoo Ph: 09-88171661 Fax: 09-88171662...

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Semiconductor Device Test-11

this book, visit Keith ley's A GREATER MEASURE OF CONFIDENCE

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