Kawasaki Clean robots

Product catalog summary

Introduction
This document provides an overview of Kawasaki's industrial robots, focusing on clean robots used in semiconductor and LCD manufacturing. It highlights the importance of adhering to safety regulations and provides contact information for support.

Safety Precautions
Operators must strictly follow safety regulations and read all manuals and safety documents. Photographs in the catalogue may not show safety devices, which should always be used.

Product Overview
Kawasaki has been a leader in the robotics industry since 1969, focusing on clean robots since 1995. The company holds over 100 patents and has shipped more than 100,000 robots globally. Their robots are designed for low-particle environments and are compatible with next-generation technologies.

Robot Lineup
The document details various series of clean robots, including NT, NS, TT, NX, and NV series, each with specific features and applications:

NT Series: Horizontal articulated robots compatible with up to 5 FOUPs, offering high throughput and compliance with ISO Class 1 standards.
NS Series: Known for reliability and performance in wafer handling, compliant with SEMI standards, and equipped with collision detection.
TT Series: Features a telescopic mechanism for high-speed handling, compliant with SEMI standards.
NX Series: Offers high precision and repeatability, suitable for semiconductor and solar panel applications.
NV Series: Designed for vacuum environments, featuring compact controllers and high-speed handling capabilities.

Specifications and Features
Each robot series is described with detailed specifications, including degree of freedom, motion range, repeatability, and compliance with industry standards. The document highlights the robots' capabilities in handling various materials like wafers, LCDs, and solar panels.

Controllers and Accessories
Kawasaki provides controllers like the D60 and D61, which support multiple axes and offer features like Ethernet communication and compliance with SEMI standards. The document also mentions grippers and aligners for enhanced functionality.

Applications
The robots are suitable for a wide range of applications, including semiconductor manufacturing, LCD panel handling, and solar panel assembly. The document provides examples of system layouts and application scenarios.

Conclusion
Kawasaki's clean robots offer innovative solutions for the automation industry, ensuring high performance, safety, and adaptability to future technological needs.

Specifications:

Dimensions: φ600×H200 mm
Cycle Time: 0.30 sec (0.5 kg), 0.36 sec (2 kg)
Repeatability: ±0.04 mm, ±0.1°
Protection Rating: IP 65
Weight: 60 kg
Models: E91 / E94 / E97
Display: TFT color LCD with touch panel
Connectivity: USB, Ethernet

Features:

Bernoulli gripper for non-contact wafer handling
Compact 6-axis high-performance robot
Suitable for clean room operations
3-freedom movement at the wrist for 3D curve trajectory operations
Flexible positioning of wafers and glass substrates

Applications:

Solar panel handling
LCD panel handling
Organic EL handling
Palletizing, packing, and picking tasks

Performance:

Model: RC05L
Max Payload: 5 kg
Degree of Freedom: 6 axes
Repeatability: ±0.03 mm
Mass: 37 kg
Cleanliness: ISO Class 5
Motion Range: Arm rotation (JT1) ±165°, Arm out-in (JT2) +135° to -80°, Arm down-up (JT3) +118° to -172°, Wrist swivel (JT4) ±360°, Wrist bend (JT5) ±145°, Wrist twist (JT6) ±360°

Catalog excerpts

Powering your potential Kawasaki Heavy Industries, Ltd. ROBOT DIVISION Tokyo Head Office/Robot Division 1-14-5, Kaigan, Minato-ku, Tokyo 105-8315, Japan Akashi Works/Robot Division 1-1, Kawasaki-cho, Akashi, Hyogo 673-8666, Japan Global Network 28140 Lakeview Drive, Wixom, Ml 48393, U.S.A. Unit 4 Easter Court, Europa Boulevard, Westbrook Warrington Cheshire, WA5 7ZB, United Kingdom Kawasaki Robotics GmbH 29 Sperberweg, 41468 Neuss, Germany Kawasaki Machine Systems Korea, Ltd. 69BL-1LT, 638, Gojan-Dong, Namdong-Gu, Incheon, 405-817, Korea Kawasaki Robotics (Tianjin) Co., Ltd. Bldg 3, No.16, Xiang'an Road, TEDA, Tianjin 300457 China Kawasaki Motors Enterprise (Thailand) Co., Ltd. (Rayong Robot Center) 119/10 Moo 4 T.PIuak Daeng, A.PIuak Daeng, Rayong 21140 Simple*e friendly •For those persons involved with the operation / service of your system, including Kawasaki Robot, they must strictly observe all safety regulations at all times. They should carefully read the Manuals and other related safety documents. •Products described in this catalogue are general industrial robots. Therefore, if a customer wishes to use the Robot for special purposes, which might endanger operators or if the Robot has any problems, please contact us. We will be pleased to help you. •Be careful as Photographs illustrated in this catalogue are frequently taken after removing safety fences and other safety devices stipulated in the safety regulations from the Robot operation system. ISO certified in Akashi Works. ^Materials and specifications are subject to change without notice. Powering your potential Kawasaki Robot Clean Robot Japan & Asia

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Kawasaki, the world’ s leading manufacturer of clean robots, offers optimum solutions for the future of your business. Kawasaki Clean Robots − Full Lineup [Lineup for semiconductor manufacturing] Kawasaki Heavy Industries made Japan’s first industrial robot in 1969, and has led the robot industry ever since. In 1995 Kawasaki began to manufacture clean robots, starting with the development of clean robots used exclusively for semiconductor and LCD manufacturing process equipment. Today our innovative lineup features a number of groundbreaking handling systems. Kawasaki holds more than 100 patents...

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"Robot for the Common Platform" Single robot that can be used with up to 4 FOUPs (option for 5 FOUPs). ICan be used with up to 4 FOUPs with no track (option for up to 5 FOUPs). Single robot that can access all the EFEMs, and can be used with between 2 to 4 FOUPs without a track. Adding the special option enables the robot to be used with 5 FOUPs. IHigh throughput The throughput of the standard robot is 280 WPH (with aligner) and 400 WPH (without aligner). The optional special gripper increases the throughput to 700 WPH. IKawasaki's original mechanism ensures long-term compliance with ISO Class...

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■The long term field operation of many NS series robots prove they have the reliability and high level of performance needed for wafer handling. ■Compliant with SEMI-F47 standard. Instantaneous response to problems such as a drop in voltage, and automatic resumption of operation when voltage is ■Compliant with SEMI-S2 standard. Sufficient consideration given to the environment and personal safety. ■Equipped with a collision detection function to lessen the damage caused by ■The flip enables the NS411 to handle wafers at both horizontal and vertical ■The NS511 is a ceiling mounted type designed...

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Edge clamp hand Vacuum hand Kawasaki can supply grippers for handling wafers organic electroluminescent panels and 450mm wafers , as well as other special types of grippers. In addition, Kawasaki can assemble user-designed grippers to be equipped with the robot. ICompact packaging. Meets all the SEMI-F47 standards. lEthernet communication port installed as standard enables a high level of communication. lAllows for flexible processing of various kinds of software. lAllows for the independent operation of the two arms as well as multi-axis controls. lUniform servo amplifiers for all the axes....

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Parallel link type A high-speed pick and place robot that offers a wide range of applications for solar panel assembly. IThe 3 kg payload capacity of this robot enables it to pick and place solar panels at very high speeds. The robot's large motion range (1,300 mm diameter and 500 mm Z-stroke) expands its range of applications within solar-panel assembly lines. IHigh repeatability ensures high productivity and accurate picking and placing. ■Highly rigid arm that minimizes vibration. IThe shaft-less design prevents mechanical trouble and makes maintenance easy. lUse of a vision sensor enables...

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