Nanomotion’s HR Series motors range in size from a single element (providing 0.4kg of force) to an eight element motor (providing 3.2kg of force). The HR series is capable of driving both linear and rotary stages. The HR series motors have a wide dynamic range of speed, from several microns per second to 250mm/sec and can easily mount to traditional low friction stages or other devices. The unique operating characteristics of the HR Series motors provide inherent braking and the ability to eliminate servo dither when in a static position. Unlimited travel Wide dynamic velocity range– Approved Excellent move & settle Step resolutions to 10nm No intrinsic magnetic field No external magnetic field sensitivity (for non-magnetic version) Vacuum versions available Motor Performance Specifications max velocity (mm/sec) dynamic stall force (N) static hold force (N) Kf force constant (N/volt commanded) Note: All motor performance data is based on using Nanomotion ceramic motors and amplifiers. All dimensions in mm Environmental Operating Temperature: to 10-7 torr after bake out -U Ultra-high Vacuum Motors: to 10-10 torr after bake out

Dimensions (European View) -S motors are Standard -V motors are Vacuum Rated to 10-7 Torr (use VN for Vacuum & Non-Magnetic) -U motors are Vacuum Rated to 10-10 Torr and are Non-Magnetic -N motors are Non-Magnetic, for MRI environments Force vs. Velocity at various work régimes 100

Nanomotion’s family of LS Series motors are available in configurations with 2, 4 and 8 elements. The LS series provides unmatched resolution for repetitive step and settle applications with zero servo dither when in position. The LS series is capable of reaching step sizes in the few nanometers range with maximum speeds of up to 20mm/sec. Unlimited travel Step resolution better than 20nm No intrinsic magnetic field No external magnetic field sensitivity Vacuum versions available Motor Performance Specifications dynamic stall force (N) static hold force (N) Kf force constant (N/volt commanded)...

Dimensions (European View) conditioning exit exit screw Note: All dimensions in mm -S motors are Standard -V motors are Vacuum Rated to 10-7 Torr (use VN for Vacuum & Non-Magnetic) Force vs. Velocity at various work régimes Velocity (mm/sec)

The ST Series Piezoelectric Motor is the smallest motor of its kind. The ST provides high resolution motion control for linear or rotary devices in a fraction of the space of traditional mechanisms. The ST is ideal for small stepping as well as continuous travel, with the ability to make step increments in the tens of nanometers and the ability to operate at speeds up to 250mm/sec. Dimensions (European View) • • • The smallest standard Piezo-Electric package Unlimited travel Wide dynamic velocity range– from 1µm/sec to 250mm/sec Excellent move & settle Standard and low speed version for high...

EDGE Motor Nanomotion's Edge motor is the smallest industrial motor of its kind available in the marketplace today. Providing unlimited linear or rotary motion, the Edge motor offers extensive opportunities in applications that suit a wide range of industries. The Edge motor works with a uniquely designed, compact ASIC-based driver, and can be operated with any servo controller. Features The Edge can be easily integrated into most bearing structures, and is ideal for mass production opportunities. Extremely small dimensions Low power consumption ASIC drive and control Wide dynamic velocity range...

EDGE Motor Driver Nanomotion's ASIC driver can support the Edge motor working in either the traditional AB1A mode or AB5 mode (with linear voltage to velocity profile). The AB1A mode can support up to two motors while the AB5 mode will support one Edge motor. The ASIC driver has specific I/O for enable and fault functionality. The driver operates as a slave in the IIC protocol. The communication is performed by exchanging messages between the master and the slave. The master initiates both types of messages: 1.) Master>Slave: the master sends a message to the slave. 2.) Slave>Master: The slave...

Nanomotion manufactures and supplies ceramic drive strips, DuraStrips and CCS ceramic coated steel for all motor types. Standard strips, rings and disks are available in a wide variety of sizes and shapes. Nanomotion can also provide custom drive strips/rings for different application requirements. The mating drive surface is critical to the motor's performance. All specifications are based on using Nanomotion's drive surfaces. Most of Nanomotion's standard drive strips are provided with vacuum compatible, double sided tape for easy mounting. The motor user manual defines the proper mounting...