StagesNanomotion Motion Systems Nanomotion's XCD in an OEM Drive & Control board designed for applications using our Edge, ST, HR motors (up to HR4). This board level control product can replace a traditional drive & servo control for a single axis application with a very small form factor. The XCD is intended for volume based applications as the communication and feedback connections are designed into the motherboard, based on customer requirements. The XCD supports, IA2C, SPI and Uart communication interfaces and takes quadrature encoder input, acting as a complete drive and control. For additional information on the XCD control boards, please contact Nanomotion. When the standard stage doesn't quite fit, Nanomotion will design a custom motion system to meet specific application requirements. In some instances, where appropriate, traditional step motors or DC motors may be used to achieve specific performance. Features • Compact design with low profile • Direct drive Piezo motor with a simple, robust construction • Optical encoders for high resolution • Standard atmosphere and vacuum compatible configurations • Wide range of sizes and travels — width motor options standard travels Note: Travel lengths to 300mm available in the FB100 and FB150 configurations. Encoders Standard encoder resolution is 0.1pm Optional resolutions: 1pm, 0.5pm, 50nm, 10nm Optional limits and home sensor (FB050 is home only) Available Mountings X/Y X/Z using angle bracket X/Y/Z using angle bracket

Performance Specifications

Performance Specifications • • • • • Compact stage design with low profile Direct drive motor with simple, robust construction Linear encoder mounted in the center for optimum positioning Easily configurable in multi-axis Wide range of slide size, travels and motor size Motor Performance Specifications travel (mm) dynamic stall force (N) Note: All standard FB stages are provided with .1µm resolution linear encoders. Encoder Options part suffix resolution -1.0M .1µm Optional -0.5M .5µm Optional -50N 50nm Optional -10N 10nm Op

FB Series Performance Specifications • Compact stage design with low profile • Direct drive motor with simple, robust construction • Linear encoder mounted in the center for optimum positioning • Easily configurable in multi-axis • Wide range of slide size, travels and motor size Motor Performance Specifications travel (mm) Encoder Cable ' dynamic stall force (N) stage mass (g) moving mass (g) Note: All standard FB stages are provided with ,1pm resolution linear encoders. Encoder Options part suffix resolution

• Compact stage design with low profile • Direct drive motor with simple, robust construction • Linear encoder mounted in the center for optimum positioning • Easily configurable in multi-axis • Wide range of slide size, travels and motor size Motor Performance Specifications Encoder Options part suffix resolution

Compact stage design with low profile Direct drive motor with simple, robust construction Linear encoder mounted in the center for optimum positioning Easily configurable in multi-axis Wide range of slide size, travels and motor size Motor Performance Specifications Travel (mm) Dynamic Stall Force Stage Mass Moving Mass Note: All standard FB stages are provided with .1µm resolution linear encoders. Encoder Options part suffix resolution -1.0M .1µm Optional -0.5M .5µm Optional -50N 50nm Optional -10N 10nm Op

Nanomotion’s FBR Rotary stage provides the most compact footprint for precision rotary motion. A 60mm diameter ceramic ring surrounds a precision crossed roller rotary bearing with a non-contact optical encoder. The FBR60 can be configured with encoder resolutions to 0.5 arc seconds and one or multiple motors for different speed/torque requirements. FBR60 Rotary Stages are available in standard, Vacuum and UHV configurations and are provided with a through hole in the center to allow for wires or other devices that require a center feed. Extremely compact footprint & low profile High stiffness...

Wedge Stage Nanomotion’s Z-wedge stage utilizes crossed roller bearings on an incline to drive a center wedge through a top and bottom plate that coupled together. This horizontal motion results in pure vertical translation of the top surface of the stage. Using a Z-wedge configuration facilitates easy access over the entire surface and from all sides. Linear position encoding is done directly on the vertical translation eliminating any errors from the angle of the wedge. Horizontal drive for vertical translation Direct position feedback with resolution from 100nm to 5 nm Capacity to 2kg Unobstructed...

Nanomotion’s FBG Series goniometer stages provide tilting motion about a pivot axis above the stage. The stage design provides the ability to couple two axes together to tip and tilt around a common pivot axis. The goniometer stages use a direct optical encoder with a tape scale on the curved surface, providing resolution down to 1 arc second. 4 available pivot axes to combine tip/tilt around a common point Range of encoder resolutions available Easily configured with any “FB” Series axes Dimensions & Specifications dynamic stall force (N)