JEBG Series / Electron Beam Sources

Product catalog summary

Overview: This document outlines the specifications and features of JEOL's electron beam sources and power supplies, designed for high thermal efficiency in the optical and electronic industries. It also covers a deposition control system utilizing these electron beam sources.

Electron Beam Sources:

BS-60050EBS: Features reduced backscattered electrons, variable accelerating voltage, and a long-life filament, with easy maintenance and contamination-resistant design.
BS-60040VDGN: Offers variable accelerating voltage and techniques to prevent electric discharge, ideal for high-reproducibility evaporation.
BS-60030DGN: A general-purpose source with a high-rate crucible for metals.
JEBG-102UHO: Produces excellent melt spots, suitable for optical thin films.
EBG-203UB4H/6S: High power with large-area scanning capabilities, allowing simultaneous evaporation of multiple materials.

Power Supplies:

JST-F Series: High-performance, high-voltage power supplies with energy-saving SCR control, configurable for computer-controlled systems.

Controllers:

BS-64010SCT Scan Controller: Optimizes scan patterns for each material, improving melt spot quality with multiple scan modes and memory for up to 15 patterns per source.

Installation Requirements: Specifies maximum output, accelerating voltage range, electron beam deflection angle, and cooling water flow rate, emphasizing the need for specific environmental conditions.

Key Features:

Direct heating for high thermal efficiency.
Water-cooled copper crucible to prevent reactions.
Easy filament replacement.
High reproducibility and uniform film thickness through high-speed scanning.

Deposition Control System: Features control for two electron beam sources, compatible with DeviceNet and RS-232C communication, allowing external PC or sequencer control. Supports various patterns and emission-current control.

Control Units: Operates JST-F series power supplies via DeviceNet, with residual-field erasing and filament-monitoring functions.

Triple Source Controller: Enables simultaneous evaporation of three evaporants with high-speed scanning.

2 Point Controller: Allows alternate irradiation of two points, enabling simultaneous evaporation of two materials with adjustable rates.

Compliance: Products are controlled under Japan's export laws, requiring specific documentation for export licenses.

Contact Information: Provides contact details for JEOL offices and distributors worldwide.

All Jeol catalogs and technical brochures

Archived catalogs

JST-F Series Power Supplies
16 Pages
BS-60050EBS Electron Beam Source with reduced backscattered electrons
16 Pages

*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.

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