J.A. Woollam Co., Inc. Ellipsometry Solutions

Capabilities The VASE® is our most accurate and versatile ellipsometer for research on all types of materials: semiconductors, dielectrics, polymers, metals, multi-layers, and more. It combines high accuracy and precision with a wide spectral range - 193 to 2500nm. Variable wavelength and angle of incidence allow flexible measurement capabilities, including: • Reflection and Transmission Ellipsometry • Generalized Ellipsometry (Anisotropy, Retardance, Birefringence) • Reflectance (R) and Transmittance (T) intensity • Cross-polarized R/T • Depolarization • Scatterometry • Mueller-matrix Focused Beam...

Advanced Technology AutoRetarder® Technology Rotating Analyzer Ellipsometers (RAE) maximize data accuracy near the “Brewster” condition - where Ψ/∆ data are content-rich. However, this region can be limiting for samples with reduced signal. The patented AutoRetarder is a computer controlled waveplate which modifies the light beam polarization before it reaches the sample. This produces optimum measurement conditions for any sample - under any conditions. AutoRetarder accurately measures: • Ψ and Δ over the full range! • Generalized (anisotropic) Ellipsometry • Depolarization data • Mueller-matrix...

Applications Telecommunications - Laser optics Optical Coatings Accurate wavelength selection using monochromator allows measurements at the operating wavelength for optics, e.g. 1550nm, 1310nm, 980nm, 632.8nm, 589nm … The AutoRetarder® measures Δ accurately even when close to 0° or 180° which helps characterize thin films on transparent substrates, such as glass or plastics. Ψ in degrees Thick Films Wavelength (nm) Fine wavelength resolution required for this thick optical coating. Bandgap, electronic transitions and critical points can be measured for semiconductor materials such as GaN, InP,...

Accessories Cryostat Temperature Control Add cryostat or heat stage for variable temperature studies. Measure samples at both low and elevated temperatures: 4.2 Kelvin to 600° C. 20 15 10 5 0 -5 Indium Phosphide, 4 Kelvin Indium Phosphide, 297 Kelvin InP optical constants at 4 Kelvin and room temp. Heat Stage Mapping Provides computer controlled or manual XY mapping of samples of various sizes. Automated sample alignment is also available. Software can automate both acquisition and analysis, as well as plot 3-D graphs.

Add cell with optical windows for measurement through liquid ambient. Allows characterization of liquid/solid interface. Electrochemical Cell Liquid Cell Electrochemical Cell 5 Inject CTAB Solution Preliminary Rinse Second Rinse Organic layer thickness deposited from a solution in a liquid cell. Further Options Focusing Camera Sample Rotator (for anisotropy) Flip Down Sample Holder Liquid Prism Cell - LMD™

Specifications Spectral Range 250-1100nm (single chamber standard) 240-1100nm (double chamber standard) DUV extension to 193nm NIR extension to 1700nm XNIR extension to >2200nm XXIR extension to 2500nm Angle of Incidence Fully Automated Range: 15°-90° (standard system) Accuracy: 0.01° System Configuration Rotating Analyzer Ellipsometry (RAE) with patented AutoRetarder®. Automated wavelength selection via monochromator. Data Acquisition Rate T Typical: 0.1 to 3 seconds per wavelength, depending on reflectivity of sample. High Accuracy: measurements using full AutoRetarder capability require 20...