Catalog excerpts
Pneumatic drive bellows pumps
Open the catalog to page 1For ultrapure chemical delivery The F series comprises pneumatic drive bellows pumps designed for use in semiconductor manufacturing processes waki pneumatic drive bellows pumps were introduced to the market over 20 years ago since then we have actively developed and improved products in step with rapidly changing market needs Over 20 models of pumps are available Their quality and performance are recognized and highly rated by device manufacturers all over the world Not only pumps, but peripheral devices such as controllers dampeners and liquid chemical supply systems have been developed...
Open the catalog to page 2Pneumatic drive bellows pumps Contamination-free Design All the wetted parts are made of fluororesin which is highly resistant to chemical attack and heat. Fiercely corrosive liquids are safety transfer with less particle matter being produced Sensor-drive System The pump is driven by a built in stroke sensor located away from the liquid path. The operation is reliable and the pumps function with stability even at Built-in Leak Sensor As standard equipment, all the models have leak sensors which are ensured to react promptly if the bellows are Enhanced Accessories Dampeners, controllers and...
Open the catalog to page 3Cleaning / circulation / replenishing / processes Chemical fluid dispensing pump Circulation pump Controller Chemical feeding equipment Circulation pump Filling up various chemical liquids metering pump Motor driver Dampener/Pressure valve Bottle of undiluted liquid Feeding tank Transfer/circulation pump
Open the catalog to page 4Pneumatic drive bellows pumps Robust bellows design advances high pressure performance and service life The adoption of thick bellows enables the pump to discharge liquid under pressure as high as 0.45 MPa maximum. Moreover, the bellows have three or four times as long a life as a diaphragm. Thus, the downtime can h addition to its use in feeding chemical liquid, the FW series specified for high pressure and medium temperature (10 to 100°C) is usable in a cleaning system and for the circulation of CMP slurry liquid and the FW-H series for high pressure and high circulation pump in a...
Open the catalog to page 5Energy saving design to * The cylinder of the "B" type is made of aluminum and tetrafluororesin and that of the "C" type is of PVC Mote: Max. discharge capacity shows when pumping clear water at 20°C.
Open the catalog to page 6Pneumatic drive bellows pumps medium temperature liquid There are two standardized models; the FA-2E, a lateral type for a low flow rate, and the FA-40VEW, a vertical type for a high flow rate. The FA-2E employs a spray system for single wafer processing while the FA-40VEW is suitable for cleaning 200/300 mm wafers H-shaped thick bellows are used(Only FA-40VEW). They have excellent resistance to high pressure and a long life to withstand continuous long-time operation. When connected to a special controller, the discharge can be controlled and monitored Mote: Max. discharge capacity shows...
Open the catalog to page 7Optional accessories Automatic dampeners Pump driver Pump pressure can be automatically adjusted to minimum pulse pressure discharge of the pump likely to be caused by the clogging of a filter. Particles are hindered from passing through filters and pipes are protected from vibrations Downtime can be reduced because there is no need of on-the-spot nstallation in existing facilities or Having no automatic pressure adjustment mechanism. Valve ball (exhaust side) Note : Above illustration shows PDA-H ^Valve ball (suction side) used at a pressure above the level specified for the pump. ssures...
Open the catalog to page 8Pneumatic drive bellows pumps Pump controller Pump controller Pump controller These are controllers specially made for the F series pumps. Each controller can control three pumps Owing to their function of fixed flow rate control, the discharge of the pump is kept at a fixed level even when the discharge pressure of the pump changes due to filter clogging so as to maintain stable circulation/ The range of pump pulsation is held always to a minimum level by automatic control of the pressure of on-the-spot adjustment of pressure is Since the difference in pressures in minimum value despite a...
Open the catalog to page 9Performance curves ■Air consumption
Open the catalog to page 10Pneumatic drive bellows pumps
Open the catalog to page 11Pneumatic drive bellows pumps Chemical fluid dispensing system The Iwaki chemical fluid dispensing system, made up of a pump (CFD) metering and supplying, in addition to hydrochloric acid solutions and hydrofluoric acid solutions, ammonia water which has a high vapor pressure, and a hydrogen peroxide solution which tends to produce bubbles, with high precision pneumatic valve type CFD-8T/APD-3 and the ball valve type CFD-8T-B/ Note: The pneumatic valve is excluded from the One APD controller can drive three CFD pumps. The amount of liquid to be supplied by each pump can be set as desired...
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