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Wafer handling robot IWH
Wafer handling robot IWH
The IWH wafer handling robot is a 2-link heavy-duty arm robot designed for precision and reliability. It features a repeatability of ±0.02° for theta, ±0.02 mm for radial, and ±0.02 mm for vertical movements. The working range includes vertical movements of 10", 13", 17", and 21", radial movements of 10", 12", 14", 16", and 20", and a theta rotation of 450°. The robot can handle payloads up to 3 kg, depending on the arm configuration, and operates at maximum speeds of 360°/s for theta, 1,000 mm/s for radial, and 450 mm/s for vertical movements. It requires a power supply of 115 – 230 VAC, 50 – 60 Hz, and 550 VA (ADVANCED). The main interface options are Ethernet [RJ-45] and RS-232 [DB9]. The robot weighs approximately 25 – 32 kg.
The IWH-TA10S10HD model offers excellent structural rigidity and precision, ensuring maximum reliability. It is available in top-mounted (TA) or bottom-mounted (BA) versions and can be customized to meet specific needs. The robot supports both absolute and incremental encoders and integrates seamlessly with Prealigner, linear track, and other peripheral components. It is compatible with ISO 1 clean-room environments and has a mean time between failures (MTBF) of over 70,000 operating hours.
The document provides detailed dimensions for various configurations, including TA13, TA10, TA17, TA21, and BA models, with specific measurements for different arm lengths and mounting options.
Catalog excerpts
Data sheet Wafer handling robot IWH excellent structural rigidity and precision maximum reliability top mounted (TA) or bottom mounted (BA) versions available customized solutions absolute or incremental encoder seamless integration with Prealigner, linear track and other peripheral components ISO 1 clean-room environment compatible MTBF: >70,000 operating hours 2-link heavy duty arm robot Repeatability Working range Maximum speed Power supply Main interface
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isel Germany GmbH / Robotics Department / Sachsenweg 8 / 36132 Eiterfeld / Germany +49 (0) 66 59 981 - 500 / [email protected] / www.iselrobotik.com ©isel Germany GmbH. Technical changes reserved. The current terms and conditions of the company isel Germany GmbH shall apply. Status february 2026 IWH 2-link heavy duty arm robot
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