Substrate handling components • customer specific • high production depth made in Germany • ISO 1 Clean room certification for wafer handlers • free training for new customers • throughput analysis

contents 8 / I WH - 2-link heavy duty arm robot 10. / IWH - 3-link heavy duty arm robot 12. / I WH - 2-link dual arm robot 14 / IWH - SHD super heavy duty dual arm robot 16 / Advanced Controller 18 / Teach pendant 20 / End Effectors - IEE Series 22 / Accessories 26 / Linear Track - ILD Series 30 / Logosol Prealigner LPA Series

Robotic products by isel robotik Our products are specifically designed and engineered to address the unique needs and requirements of the semiconductor, flat panel display, nanotechnology and related industries. Greatness is made of shared knowledge isel Germany is part of the stocklisted c ompany Aalberts since february 2022. Since the inception in 1975, Aalberts is where technology matters and real progress can be made - humanly, financially and environmentally. Just like isel Germany, all Aalberts companies stand their ground in the engineering and t echnology world. As the world is changing...

Substrate handling components How can we help? If you have special applications or product requirements please contact us. With several thousand systems in field and many years of experience, we look forward to receiving your inquiries. Thomas Schlicher Valuestream Manager Robotics +49 (0) 6659 981-420 [email protected] Thomas Völlinger Andreas Möller Melanie Schulz Michael Raschke

Substrate handling components Innovative robot technology for substrate handling Robust and longlasting all-in-one solutions, customer specific manufacturing, comprehensive project support. isel Germany GmbH is your perfect partner for substrate handling components for semiconductor industry.

Wafer handling robot IWH • excellent structural rigidity and precision • maximum reliability • top mounted (TA) or bottom mounted (BA) versions available • customized solutions • absolute or incremental encoder • seamless integration with Prealigner, linear track and other peripheral components • ISO 1 clean-room environment compatible • MTBF: >70,000 operating hours specifications 2-link heavy duty arm robot Repeatability Working range Maximum speed Power supply Main interface

Substrate handling components

Wafer handling robot IWH • absolute or incremental encoder • seamless integration with Prealigner, linear track and other peripheral components • ISO 1 clean-room environment compatible • MTBF: >70,000 operating hours • excellent structural rigidity and precision • maximum reliability • top mounted (TA) or bottom mounted (BA) versions available • customized solutions specifications 3-link heavy duty arm robot Working range Maximum speed Power supply Main interface

Substrate handling components

Wafer handling robot IWH • excellent structural rigidity • maximum reliability and precision • seamless integration with Prealigner, linear track and other peripheral components • very smooth running • backlash free Harmonic Drive® gears • Heidenhain® absolute encoder • exact vacuum value can be displayed via controller software • fully integrated software adjustable vacuum sensors • ISO 1 clean-room environment compatible • MTBF: >70,000 operating hours specifications 2-link dual arm robot Working range Maximum speed Power supply Main interface

Substrate handling components

Wafer handling robot IWH • excellent structural rigidity • proven for panel handling • maximum reliability and precision • seamless integration with Prealigner, linear track and other peripheral components • very smooth running • backlash free Harmonic Drive® gears • absolute or incremental encoder • fully integrated software adjustable vacuum sensors (ADVANCED controller) • ISO 1 clean-room environment compatible • MTBF: >70,000 operating hours specifications SHD super heavy duty dual arm robot Working range Maximum speed Power supply Main interface

Substrate handling components mounting screws

ADVANCED Controller The ADVANCED Controller has a defined path speed, so that speed and acceleration focus on the tool centre point (TCP) and not on individual axes. UL 1740:2018 ADVANCED controller back

Substrate handling components The innovative path control guarantees a constant and maximum speed on the TCP which ensures additional safety during substrate handling. The controller runs on Powerlink real time bus system which improves performance even further. The supported high voltage technology enables very dynamic behavior when using an additional linear motor axis. isel ADVANCED controllers complies with current international standards for industrial robots. The operating interface integrated into the controller can be visualized on any PC with VNC viewer. It provides an innovative and...

Teach pendant Graphical User Interface (GUI)

Teach pendant optimal support when setting up an isel wafer handler with ADVANCED controller GUI on a 10,1" VGA colour display ergonomic multi-grip for fatigue-free work hand wheel for jogging operation enable switch and stop button for safe manual operat

IEE Series isel end effectors are optionally available with many different contact materials such as PTFE (SafeCoat), PEEK, VITON, KALREZ. Additionally, we offer many special designs for your individual wafers and substrates. We will create the solution to your customized endeffector requirements. for all wafer sizes high rigidity good cost/performance ratio PTFE SafeCoat (Standard) for each of our robots High-resistance dissipative coating available different wafer mapping sensors several surface coatings special designs: pocket - friction wafer edge grip - exclusion zone vacuum Extended Horse-Shoe...

Accessories Wafer Mapping Sensors Separate through beam unit Through beam sensor Through Beam Sensor optional to reflective Sensor integrated in endeffector or as separate unit more suitable for thin wafer mapping light source: 2 x 850 mm diode lasers optimum detecting range: 38 mm (1.5") Maximum detecting range: 40 mm (1.6") Laser class 1 PNP precise wafer flipping by adjustable mechanical stops universal endeffector adapter adjustable hard stop damping adjustable flip speed option: lateral mapping sensor TAP to EE 100 mm ADVANCED controller only: End Effector Changer full automatic endeffector...