successful with wafer handling components Wafer Handling Components FOR SEMICONDUCTOR INDUSTRY

EFFICIENT & ECONOMICAL WAFER HANDLERS Your added value in the semiconductor industry • • • • • customer specific high production depth made in Germany ISO 1 Clean room certification for wafer handlers free training for new customers throughput a

Thomas Völlinger Division manager IWH - 2-link heavy duty arm series 1 IWH - 3-link heavy duty arm series 1 IWH - 2-link heavy duty arm series 3 IWH - super heavy duty dual arm SHD Controller - Advanced Accessories20 Linear Track - ILD Series Logosol Prealigner - LPA Series Andreas Möller This catalogue contains a variety of robotic products offered by isel robotik. Our products are specifically designed and engineered to address the unique needs and requirements of the semiconductor, flat panel display, nanotechnology and related industries. If you have special applications or product requirements...

INNOVATIVE TECHNOLOGY The ADVANCED controller has a defined path speed, so that speed and acceleration focus on the tool centre point (TCP) and not on individual axes.

FIRST CLASS SERVICE Free training for new customers, telephone support and ongoing project support from experienced isel technicians. Our main focus always is to please our customers with excellent service. Trust our worldwide service, e.g. with longterm partners in Asia or our partner in the USA. The high spare part availability reduces your downtime to a minimum.

CUSTOMERSPECIFIC SOLUTIONS You will get the perfect handling system for your production. On request, we can tailor your handling robots individually from isel components to provide high-performance automation solutions that are optimally aligned to your production requirements and with significantly short production times. If the standard cannot meet the requirements, we offer you individual solutions.

Innovative robot technology for Wafer Handling Robust and longlasting all-in-one solutions, customer specific manufacturing, comprehensive project support. isel Germany AG is your perfect partner for wafer handling components for semiconductor industry.

WAFER HANDLING ROBOT | IWH WITH 2-LINK HEAVY DUTY ARM AND BODY SERIES 1 Characteristics • excellent structural rigidity and precision • maximum reliability • top mounted (TA) or bottom mounted (BA) versions available • customized solutions • absolute or incremental encoder • seamless integration with Prealigner, linear track and other peripheral components • ISO 1 clean-room environment compatible • MTBF: >70,000 operating hours Working range Maximum speed Power supply Main interface Fraunhofer TESTED DEVICE isel Germany AG IWH-BA13S14HDF

WAFER HANDLING ROBOT | IWH WITH 3-LINK HEAVY DUTY ARM AND BODY SERIES 1 Characteristics • excellent structural rigidity and precision • maximum reliability • top mounted (TA) or bottom mounted (BA) versions available • customized solutions • absolute or incremental encoder • seamless integration with Prealigner, linear track and other peripheral components • ISO 1 clean-room environment compatible • MTBF: >70,000 operating hours Working range Maximum speed Power supply Main interface

WAFER HANDLING ROBOT | IWH WITH 2-LINK DUAL ARM AND BODY SERIES 3 Characteristics • excellent structural rigidity • wafer handling up to 300mm • maximum reliability and precision • seamless integration with Prealigner, linear track and other peripheral components • very smooth running • backlash free Harmonic Drive® gears • absolute or incremental encoder • exact vacuum value can be displayed via controller software • fully integrated software adjustable vacuum sensors • ISO 1 clean-room environment compatible • MTBF: >70,000 operating hours Optional: 2 flip modules iFM-300-3 available with high...

WAFER HANDLING ROBOT | IWH WITH SHD SUPER HEAVY DUTY DUAL ARM AND SHD BODY Characteristics • excellent structural rigidity • proven for panel handling • maximum reliability and precision • seamless integration with Prealigner, linear track and other peripheral components • very smooth running • backlash free Harmonic Drive® gears • absolute or incremental encoder • fully integrated software adjustable vacuum sensors (ADVANCED controller) • ISO 1 clean-room environment compatible • MTBF: >70,000 operating hours Working range Maximum speed Power supply Main interface

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CONTROLLER | „ADVANCED“ The ADVANCED controller is based on a continuous path control with integrated safety PLC which incorporates state-of-the-art technology. The innovative path control guarantees a constant and maximum speed on the TCP which ensures additional safety during substrate handling. The controller runs on Powerlink real time bus system which improves performance even further. The supported high voltage technology enables very dynamic behavior when using an additional linear motor axis. isel ADVANCED controllers complies with current international standards for industrial robots....

Graphical User Interface (GUI) Teach pendant for ADVANCED controller • optimal support when setting up an isel wafer handler with ADVANCED controller • GUI on a 6,5" VGA colour display • ergonomic multi-grip for fatigue-free work • hand wheel for jogging operation • enable switch and stop button for safe manual operation (complies with EN ISO 138

END EFFECTORS | IEE SERIES ISEL END EFFECTORS ... are optionally available with many different contact materials such as PTFE (SafeCoat), PEEK, VITON, KALREZ. Additionally, we offer many special designs for your individual wafers and substrates. We will create the solution to your customized endeffector requirements. Extended Horse-Shoe

• for all wafer sizes • high rigidity • good cost/performance ratio • PTFE SafeCoat (Standard) for each of our robots • High-resistance dissipative coating available • different wafer mapping sensors • several surface coatings • special designs: pocket - friction wafer edge grip - exclusion zone vacuum