Wafer Handling components
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Catalog excerpts

Wafer Handling components - 1

Wafer Handling components for the semiconductor industry

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Content The product offers contained in this catalog are a variety of robotic products offered by the isel group. Our products are specifically designed and engineered to address the unique needs and requirements of the semiconductor, flat panel display, nano-technology, and related industries. If you have a special application or product requirement which is not fully addressed by the offerings in this catalog, please contact us we will be delighted to work with you to find a solution that meets your needs. Efficient & economical wafer handlers Your added value in the semi-conductor...

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Customer-specific solutions With us you get the handling system that is a perfect fit for your production. On request, we can tailor your handling robots individually from isel components to provide high-performance automation solutions that are optimally aligned to your production requirements and with significantly short production times. Innovative robot technology for Wafer Handling Robust and long-lasting all-in-one solutions, customer-specific manufacturing, comprehensive project support and outstanding value for money: Isel Germany AG is the perfect robotic partner for original...

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INNOVATIVE TECHNOLOGY Reliable and long-lasting components for wafer handling by isel cover all the needs of OEM customers in the semiconductor industry. The Advanced Controller has a defined path speed, so that speed and acceleration focus on the tool centre point (TCP) and not on the individual axes. FIRST CLASS SERVICE Free training for new customers, telephone support and ongoing project support from experienced isel technicians: Our main focus is always to please our customers with excellent service. Trust our worldwide service, e.g. with longterm partners in Asia or our new partner...

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WITH 2-LINK COMPACT ARM AND 7" BODY SERIES 1 CHARACTERISTICS • cost-effective • excellent structural rigidity and precision • maximum reliability • top mounted (TA) or bottom mounted (BA) versions available • customized designs • incremental encoder • seamless integration with prealigner, linear track and other periphal components • including „Standard" controller and software • ISO 1 dean-room environment compatible • MTBF: > 50,000 operating hours SPECIFICATIONS Repeatability iselRoBOTiK Handling and more: iselRoBOTiK Handling and mdre:

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Wafer Handling Robot | IWH with 2-link heavy duty arm and body series 1 Main interface Power supply Payload Maximum speed Specifications Repeatability isel Germany AG IWH-BA13S14HDF-1 Report No. IS 1103-547 • excellent structural rigidity and precision • maximum reliability • op mounted (TA) or bottom mounted (BA) t versions available • customized designs • absolute or incremental encoder s • eamless integration with prealigner, linear track and other periphal components • ncluding „Standard“ or „Advanced“ i controller and software I • SO 1 clean-room environment compatible M • TBF: >...

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Wafer Handling Robot | IWH with 3-link heavy duty arm and body series 1 • excellent structural rigidity and precision • maximum reliability • op mounted (TA) or bottom mounted (BA) versions available t • customized designs • absolute or incremental encoder s • eamless integration with prealigner, linear track and other periphal components • ncluding „Standard“ or „Advanced“ controller and software i I • SO 1 clean-room environment compatible M • TBF: > 50,000 operating hours Main interface Power supply Payload Maximum speed

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WAFER HANDLING ROBOT | IWHWITH 2-LINK HDPLUS ARM AND BODY SERIES 3 CHARACTERISTICS • excellent structural rigidity and precision • maximum reliability • top mounted (TA) or bottom mounted (BA) versions available • customized designs • absolute or incremental encoder • seamless integration with prealigner, linear track and other periphal components • including „Standard" or „Advanced" controller and software • MTBF: > 50,000 operating hours iselRoBOTiK Handling and more: DIMENSIONS |e"e"e e ^ E E E ‘".Ot 1ft lO rvj *3- cm r-* r-» lo lo tn iselRoBOTiK Handling and mdre:

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WAFER HANDLING ROBOT | IWHWITH 2-LINK DUAL ARM AND BODY SERIES 3 CHARACTERISTICS excellent structural rigidity wafer handling up to 300mm maximum reliability and precision easy connection of a linear track to the robot controller very smooth running backlash free Harmonic Drive® gears absolute or incremental encoder integrated 2-channel vacuum display (standard controller) fully integrated software adjustable vacuum sensors (advanced controller) including „Standard" or „Advanced" controller and software ISO 1 dean-room environment compatible MTBF: > 50,000 operating hours option: 2 flip...

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WAFER HANDLING ROBOT | IWHWITH SHD SUPER HEAVY DUTY DUAL ARM AND SHD BODY CHARACTERISTICS • excellent structural rigidity • wafer handling of up to 450 mm • maximum reliability and precision • easy connection of a linear track to the robot controller • very smooth running • backlash free harmonic Drive® gears • absolute or incremental encoder • fully integrated software ajustable vacuum sensors (advanced controller) • including „Advanced" controller and software • ISO 1 clean-room environment compatible • MTBF: > 50,000 operating hours • option: 2 flip modules iFM-300-3 iselRoBOTiK Handling...

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CONTROLLER & SOFTWARE | „STANDARD" The controller which is completely integrated into the wafer handler has been in widespread use for over 15 years and has proven itself in the semiconductor industry. Because there is no seperate external controller used, the handling system only requires very little space and is also well suited for replacing other robot systems (emulations are available on request). CHARACTERISTICS • less wiring • large range of functions • alignment on the fly function (OTF) • integrated electronic (all in one design) • tested over 15 years • interface: RS232,...

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