EDA 407Electronic Device Analyzer The EDA 407 is especially designed to comply with the increasing requirements of the electronic device industry for product monitoring and quality control of hermetically sealed electronic components. nProcess nstruments

Technical data Mass range 1-512 amu Detector 90° off axis SEM Humidity analysis in electronic devices • High-performance quadrupole mass spectrometer for quality control of electronic devices • Detection limit for water < 500 ppm for volumes 10 - 500 pl • Qualitative and quantitative analysis of gas inclusions inside the housing of electronic devices from ppm to 100 % • Fully automated data analysis Humidity generator for calibration with water vapour • Dew point temperature from -30°C to +15°C (500 - 17.000 ppm H2O)