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SFS01 Brochure en

Product catalog summary

Overview: The SFS01 is a thermal mass flow sensor designed for fast measurement of gas flow and direction. It is suitable for various applications including automation, process regulation, medicinal technology, air conditioning, and portable devices.

Characteristics:

Measurement range: 0.0 to 3.5 m/s for gases.
Fast response time and low power requirement.
Easy integration into systems.

Technical Sensor Data:

Dimensions: 6.00 x 2.00 x 0.525 mm.
Temperature range: 0 °C to +80 °C; Storage: -20 °C to +80 °C.
Compressive load: up to 1 bar for 10 years.

Electrical Sensor Data:

Connection via bond pads; recommended wedge-wedge bonding with aluminum wires.
Heater resistance: 1,000 Ω ± 20%.
Thermopile resistance: < 40 kΩ; Sensitivity: > 5 mV/mW.

Flow Performance:

Medium: Non-aggressive gases with 5-95% relative humidity.
Measurement range: 0.0 to 3.5 m/s; Sensitivity: 0.002 m/s.
Response time: 5 ms; Accuracy: 0.2% F.S.

Bondpad Configuration: The sensor includes specific bondpad configurations for thermopiles and heaters, ensuring proper electrical connections.

Order Information:

Sensor element SFS01: Order code 105050.
EvaKit SFS01: Order code 105059.

Additional Notes: All mechanical dimensions are valid at 25 °C. The document reserves the right for technical changes and disclaims liability for errors.

Catalog excerpts

SFS01 (Silicon Flow Sensor) Characteristics & Applications Characteristics: Thermal mass flow sensor Optimal for fast measuring of gas flow and direction Detection of flow direction Very fast response time Very low power requirement Easy system integration Automation technology Process and regulation technology Medicinal and biological technology Battery-operated applications in portable devices 1) For exact size see measurements DFSFS01_E2.3.1_preliminary | Flow | SFS01 (Silicon Flow

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Technical Sensor Data 6.00 (±0.05) x 2.00 (± 0.02) x 0.525 (±0.01) Temperature range: Storage temperature: Compressive load: up to1 bar (one-sided on membrane for a duration of 10 years) Electrical Sensor Data Bond pads (recommended bonding process: wedge-wedge with aluminum wires) Heater resistance: Thermopile resistance: Thermopile sensitivity: Thermopile synchronization sensitivity: Thermopile voltage: typically 3-10 mW (air), maximum tolerance: 20 mW Heater output: Flow Performance The following values are viewed as typical and achieved in laboratory conditions. The gas used was nitrogen....

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Hz2 - right heater (heater series connection supply voltage) Hz1 - left heater (heater series connection supply voltage) Hzcom heater at parallel circuit/mutual connection Order Information Sensor element Order code Former oder code Additional Electronics EvaKit Order code Formder order code Innovative Sensor Technology IST AG, Stegrütistrasse 14, 9642 Ebnat-Kappel, Switzerland Phone: +41 71 992 01 00 | Fax: +41 71 992 01 99 | Email: [email protected] | www.ist-ag.com All mechanical dimensions are valid at 25 °C ambient temperature, if not differently indicated • All data except the mechanical...

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SFS01 Brochure en

SFS01 Brochure en

Catalog excerpts

All Innovative Sensor Technology IST AG catalogs and technical brochures