Thermal Mass Flow Sensor Optimal for various gas flow applications up to 400 °C Benefits & Characteristics Simple signal processing Excellent long-term stability Simple calibration Excellent reproducibility Maximum operating temperature range up to 400 °C Symmetrical heater design and heightened sensitivity Customer-specific sensor available upon request 1) For actual size, see dimensions Technical Data Operating measuring range: Response sensitivity: < 3 % of the measured value (dependent on the electronics and calibration) ~200 ms (jump from 0 to 10000 sccm) Operating temperature range:* Temperature sensitivity: Reference element:* Voltage range (nominal):* Maximum heater voltage:* * Customer-specific alternatives available DFFS74W_E2.3.1_preliminary | Flow | Thermal Mass Fl

temperature sensor Order Information - Pt/Ni-wire, ø 0.2 mm, 15 mm Dimension (L x W x H in mm) Order code Additional Electronics Former order code Document name: DFFS_FSL_Module_E Additional Documents Application Note: Document name: Innovative Sensor Technology IST AG, Stegrütistrasse 14, 9642 Ebnat-Kappel, Switzerland Phone: +41 71 992 01 00 | Fax: +41 71 992 01 99 | Email: [email protected] | www.ist-ag.com All mechanical dimensions are valid at 25 °C ambient temperature, if not differently indicated • All data except the mechanical dimensions only have information purposes and are not to be...