OCTIV VI Probe SUITE Multi-Frequency RF System with Plasma Diagnostics and Complex Waveform Analysis Interchangeable Connectors Measures • Voltage • Current • Phase • Harmonics • Impedance • Ion Flux • Waveform Reconstruction Functionality • Time averaged • Pulse Profile • Pulse Trend • Smith chart Features • Interchangeable connectors • Compact probe design • Frequency agile software • API for extending software • USB 2.0 as standard The Octiv Suite RF diagnostic is an in-line RF voltage, current, phase, harmonics and plasma diagnostic system. It can measure all the parameters of RF power, break them down to their individual components and reconstruct the waveforms of multiple fundamental frequencies simultaneously. This cutting edge system can also measure plasma parameters such as ion flux by using the RF electrode as a sensor. The Octiv Suite is truly in a class of its own when it comes to analysing power delivery into a plasma reactor. The Octiv Suite measures voltage, current, phase, impedance and harmonics and the measurements can be viewed from a PC or direct on the optional meter unit. www.impedans.com | Tel: +353 1 842 8826 | e-mail: [email protected]

Sensor Specifications Voltage Range Current Range Phase Range Harmonic (Voltage, Current and Phase) Frequency Range Fundamental Frequencies Impedance Power Real, Forward and Reflected (Watt) Power Real, Forward and Reflected (dBm) Measuring Plasma Parameters Number of fundamentals RF Power Operating Temperature Storage Temperature Uniformity Harmonic Content Connectors Sensor Impedance Certification Calibration Cycle (F0) Maximum of 5 simultaneously Max 12.5 kW (limited by connector) 0 to +40° C (32 to 104° F) -20 to +80° C (-4 to +176° F) 2% Maximum Measured (No Limit within Range) All Standard...