OCTIV | POLY VI Probe
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OCTIV | POLY VI Probe Monitor Voltage, Current, Phase and Impedance of Multiple Fundamental Frequencies and their Harmonics Interchangeable Connectors The Octiv Poly VI Probe​is used to monitor the radio-frequency (RF) characteristics of your plasma processing equipment. Applications include fault detection and classification, chamber-to-chamber matching and process fingerprinting. Successful implementation helps to improve production yield, increase product throughput and reduce product scrappage. Measures • Voltage • Current • Phase • Harmonics • Impedance Functionality • Time averaged The RF ​ haracteristics of the process​​ an be​correlated ​o​process performance c c t i.e. reference baselines can be established and fault signatures can be identified​ . The sensor monitor​ ​a wide range of ​ F ​ arameters​​suitable for use in multivariate s R p , analyse​ techniques​​hich provide extremely sensitive fault detection and is w classification algorithms​ It ​ nables indirect measurement​ of plasma parameters​​ . e , helping you to understand and control the process. ​ ​ e Octiv Poly helps to define Th exact process windows and determine the health of power subsystems and process run-to-run stability. The Octiv Poly VI Probe is a precision ​ F voltage, current​ and impedance sensor​ R designed to​ sit​ between​ match​ng​ unit​ and RF process chamber​ It is ​ ptimised​ i . o to measure​ RF​ impedance ​n non 50 Ohm environments​ It monitors multiple i . fundamental frequencies and their harmonics with 1% accuracy​and 100 sample per second report rate. For pulsed RF applications it has 1 μs time resolution​for pulse profiling​ The Octiv Poly VI Probe is ideal for accurately monitoring dual frequency . and triple frequency plasma systems. • Pulse Profile • Pulse Trend • Smith chart Features • Interchangeable connectors • Compact probe design • Frequency agile software • API for extending software The Octiv Poly has a range of 3 kV and 20 A​with standard connectors and custom ​ designs can be provided to meet most applications. It is calibrated at 5 ​ tandard s fundamental​​​ equencies: 2 MHz | 13.56 MHz | 27.12 MHz | 40.68 MHz | 60 MHz.​​ fr The Octiv Poly uses unique patented VI probe technology, designed for reliable operation in simultaneous multi-frequency applic

Voltage Range Current Range Phase Range Harmonic (Voltage, Current and Phase) Frequency Range Fundamental Frequencies Power Real, Forward and Reflected (Watt) Power Real, Forward and Reflected (dBm) Impedance *Connector dependent Voltage Time Current Time Phase Time Harmonic (Voltage, Current and Phase) Time Frequency Time Impedance Time Power Real, Forward and Reflected (Watt) Time Power Real, Forward and Reflected (dBm) Time Voltage Accuracy Current Accuracy Phase Accuracy Harmonic (Voltage, Current and Phase) Accuracy Frequency Accuracy Impedance Power Real, Forward and Reflected...