LANGMUIR PROBE Plasma Volume Characterisation Interchangeable Single & Double Probe system Measures • Floating potential (Single Only) • Plasma potential (Single Only) • Plasma density • Ion current density • Electron energy distribution function (Single Only) Functionality • Time averaged • Time resolved • Time trend Features • Langmuir probe automated electronics unit • Advanced analytical software suite • Replaceable probe head • Quick start and advanced user modes • Integrated air cooling • External trigger • DC compensation The Langmuir Probe is one of the most common and widely used plasma diagnostics and characterisation instruments to measure parameters in the bulk of the plasma. The Langmuir Probe measures plasma parameters such as floating potential, plasma potential, plasma density, ion current density, electron energy distribution function and electron temperature. Impedan's Langmuir Probe has the most advanced technology on the market and analyses ion and electron currents to obtain accurate measurements of the plasma parameters in a wide range of plasma applications. Ours is the fastest and most reliable Langmuir probe on the market (time resolution 12.5 ns). In addition to speed and reliability, it provides the most advanced fully automated data analysis in real time. The Impedans Langmuir Probe system comes complete with interchangeable single and double probe tips (at no extra cost) which can be used with the same electronics unit. This allows users to conduct experiments across different reactors and allows measurements in reactors which have a poor ground return. The Langmuir Probe is used to establish plasma process repeatability. It helps the user to understand plasma changes and the impact on surface treatment. It is an essential plasma process diagnostic to understand the correlation between plasma inputs and the plasma state which reduces process and tool development time, as well as the time to market for new plasma products. Pulsed plasmas are used to tailor the electron or ion energy and the Langmuir Probe is an integral part of pulsed process development. www.impedans.com | Tel: +353 1 842 8826 | e-mail: [email protected]

Plasma Density Electron Temperature Electron Energy Distribution Function Spatial Resolution Langmuir Probe Specifications Plasma Potential Floating Potential Plasma Power Source DC, RF, Microwave, Continuous, Pulsed Plasma Probe Length Probe Diameter Probe Customisation 90°, 45° Bend (Custom Available) Maximum Operating Temperature Spatial distribution of electron density and energy in a 150mm chamber Time Resolution Electronics Control Unit Probe Voltage Scan Range Current Range 15 nA to 150 mA or 1.5 µA to 1 A for high current densities Sampling Rate Data Acquisition Resolution Time Resolved...