INDUSTRIAL | OCTIV VI Probe Technology

Product catalog summary

Overview
The Octiv VI probe is an advanced RF voltage and current sensor designed for diverse installation environments, particularly in semiconductor and medical device markets. It is the first of its kind to meet industrial communication standards, enabling real-time monitoring and control of automated plasma and RF processes.

Specifications

Measurement Capabilities: Voltage (20 – 3000 Vrms), Current (0.1 – 100 Arms), Phase (± 180º), Harmonics (up to 15 per frequency), Frequency (350 kHz - 100 MHz), Power (200 mW to 12 kW).
Accuracy: Voltage ± 1%, Current ± 1º, Phase ± 1º, Harmonics ± 5%, Frequency ± 10 kHz, Power ± 1%.
Resolution: Voltage 0.25 V, Current 10 mA, Phase 0.01°, Frequency 1 kHz.
Connectors: N, HN, 7/16's, LC (custom options available).
Power Requirements: USB powered.
Operating Conditions: Temperature 0 to +55°C, Humidity 95% max (non-condensing).
Certification: CE mark, Calibration cycle of 12 months.

Functionality

Time-averaged, pulse profile, and pulse trend analysis.
Communication through USB, serial, and Ethernet ports, supporting TCP/IP networks.
API compatibility with LabVIEW, C/C++, Visual Basic, and .NET framework.

Features

Interchangeable connectors and custom options available.
Supports up to 5 simultaneous fundamental frequencies.
Maximum RF power of 12 kW, limited by connector type.

Application Software

Compatible with Windows 2000, XP, Vista, 7, 8, and 10.
Ethernet Web Service Protocol with optional EtherNet/IP and EtherCAT.

Conclusion
The Octiv VI probe is a versatile and precise tool for monitoring RF processes, offering significant improvements in process efficiency and yield through its advanced measurement and communication capabilities.

Catalog excerpts

INDUSTRIAL | OCTIV VI Probe Technology-1

INDUSTRIAL | OCTIVVI Probe TechnologyMonitor RF Process Health | Prevent Product Scrap | Improve Process Yield Interchangeable Connectors Measures • Voltage • Current • Phase • Harmonics • Impedance Functionality • Time averaged • Pulse profile • Pulse trend Features • 1 x USB, 1 x serial & 2 x RJ45 Ethernet ports • Can communicate through any TCP/IP network • API enables communication with device using LabVIEW, C/ C++, Visual Basic (VB_ and C # through .NET framework The Octiv VI probe is an advanced and versatile radiofrequency (RF) voltage and current sensor. It can be used in a variety of installation environments and has a wide range of applications. It sees widespread deployment on RF processing equipment used in the semiconductor (and related industries) and in the medical device market. The industrial Octiv is the first device of its type to address the needs of the industrial customer, in terms of communication standards. The Octiv is a fully enabled internet network node that paves the way for monitoring and control of automated industrial plasma and/or RF processes in real-time to increase efficiency in ways impossible until now. www.impedans.com | Tel: +353 1 842 8826 | e-mail: [email protected]

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INDUSTRIAL | OCTIV VI Probe Technology-2

Harmonic (Voltage, Current and Phase) Accuracy ± 5% Power Real, Forward and Reflected (Watt)* ± 1% Harmonic (Voltage, Current and Phase) Resolution As above Frequency Resolution 1 kHz Measuring Parameters (Range) Voltage Range Current Range Phase Range Harmonic (Voltage, Current and Phase) Frequency Range Fundamental Frequencies Power Real, Forward and Reflected Impedance *Connector dependent Pulse Repetition Frequency (SYNC) Voltage Time Current Time Phase Time Harmonic (Voltage, Current and Phase) Time Frequency Time Impedance Time Power Real, Forward and Reflected Time Connectors...

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.

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