INDUSTRIAL | OCTIVVI Probe TechnologyMonitor RF Process Health | Prevent Product Scrap | Improve Process Yield Interchangeable Connectors Measures • Voltage • Current • Phase • Harmonics • Impedance Functionality • Time averaged • Pulse profile • Pulse trend Features • 1 x USB, 1 x serial & 2 x RJ45 Ethernet ports • Can communicate through any TCP/IP network • API enables communication with device using LabVIEW, C/ C++, Visual Basic (VB_ and C # through .NET framework The Octiv VI probe is an advanced and versatile radiofrequency (RF) voltage and current sensor. It can be used in a variety of installation environments and has a wide range of applications. It sees widespread deployment on RF processing equipment used in the semiconductor (and related industries) and in the medical device market. The industrial Octiv is the first device of its type to address the needs of the industrial customer, in terms of communication standards. The Octiv is a fully enabled internet network node that paves the way for monitoring and control of automated industrial plasma and/or RF processes in real-time to increase efficiency in ways impossible until now. www.impedans.com | Tel: +353 1 842 8826 | e-mail: [email protected]

Harmonic (Voltage, Current and Phase) Accuracy ± 5% Power Real, Forward and Reflected (Watt)* ± 1% Harmonic (Voltage, Current and Phase) Resolution As above Frequency Resolution 1 kHz Measuring Parameters (Range) Voltage Range Current Range Phase Range Harmonic (Voltage, Current and Phase) Frequency Range Fundamental Frequencies Power Real, Forward and Reflected Impedance *Connector dependent Pulse Repetition Frequency (SYNC) Voltage Time Current Time Phase Time Harmonic (Voltage, Current and Phase) Time Frequency Time Impedance Time Power Real, Forward and Reflected Time Connectors...