ALFVEN 100 RF Event Detector Detect Arcs & Events | Pulse Monitoring | Pulse Profiling Measures • RF voltage amplitude • RF current amplitude • Pulse Monitoring Functionality • Captures RF events with microsecond resolution • RF strike event capture • RF event classification • Capturing of events can be user-defined • Averaged values reported up to 10 times a second • Up to 5,000 events and 500,000 averaged values can be stored onboard the sensor later. Features • 50 O characteristic impedance • Designed for pre-match installation • RF voltage and current event detection with 1 ps time resolution • Interchangeable connectors • Compact probe design • Network API for software integration The Alfven | 100 RF Event Detector is designed to monitor short-lived, unexpected events in radio frequency and plasma processes, that can cause product scrappage and significant cost to the manufacturer. The Alfven | 100 RF Event Detector application runs on our best-in-class VI probe technology platform. It monitors events such as arcs, ignition phenomena and instabilities, in plasma and other RF processes, with 1 ps resolution. It detects events in both the voltage and current signals. Our intelligent sensing platform is fully web enabled. Use one of the Ethernet ports to connect to a PC to run our proprietary application software. For a fully connected solution, interface with the process tool or the factory host through the Ethernet connection. Industrial protocols such as Ethernet/IP and EtherCAT are supported. Plasma processes, in semiconductor (and related industries), such as plasma etching, PVD and PECVD are susceptible to events such as arcs, instabilities and ignition phenomena. The Alfven | 100 will detect these events and send real time information to the operator to enable corrective action. www.impedans.com | Tel: +353 1 842 8826 | e-mail: [email protected]

Sensor Specifications RF Power Operating Temperature Storage Temperature Connectors Sensor Impedance Certification Maximum 11.25 kW (Higher possible with custom connectors) 0° to +40° C (32° to 104° F) -20° to +80° C (-4° to +176° F) N, HN, 7/16's, LC, (Custom available on request) 50 n CE mark Example of Event Count display over a monthly period. Recommended Install Input Signal Voltage Current Frequency Voltage Accuracy Current Accuracy Maximum Voltage 1,500 Vrms Maximum 15 Arms 13.56 MHz 10% 10% Operating System Windows 2000 / XP / Vista / Windows 7 / Windows 8 / Windows 10 Connectivity Ethernet...