INLINECOATER™R
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INLINECOATER™R Integrated vacuum coating equipment for automotive lighting reflectors ■ Aluminum + SiOX coating ■ Integrateded with injection molding ■ Superior quality control and low cost Automated production cells with plastic injection molding and the INLINECOATER™R coating equipment is the industry's most cost efficient manufacturing solution for lighting reflectors. Fulfilling automotive industry standards and requirements the INLINECOATER™R is equipped for plasma etching, high quality magnetron sputtering of metals, and plasma enhanced CVD (PECVD) for SiOX coating.

Side view Process chambers TECHNICAL DATA System configuration Loadlock Number of process chambers Substrate transfer Substrate holder Processes and sources Substrate bias Plasma etching Deposition sources Number of deposition sources Source orientation Plasma polymerization using Yes plasma enhanced CVD Vacuum system Base pressure <1x10-5 Torr Turbo molecular pump Backing pump Pump, loadlock evacuation Productivity Typical batch time Control system Utilities Electricity Cooling water Compressed air Process gas System weight Automatic or manual 3 Rotating revolver, under vacuum Horizontal,...