INLINECOATER™FC
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INLINECOATER™ FC Industrial vacuum coating equipment for fuel cell metal bipolar plates ■ High quality bipolar plate coatings ■ Cost effective production equipment ■ Integration in automated production The INLINECOATERTMFC is dedicated to the coating of metal bipolar plates for fuel cells, using deposition configuration optimized for Ceramic MAXPHASE™ coating. Very short cycle times allow integration of the INLINECOATERTMFC in automated production. The result is the most cost effective coating solution for metal bipolar plates, meeting technical and quality requirements by automotive customers worldwide.

Process chambers Maximum quality coating area is 350 x 320 mm. Side view Top view TECHNICAL DATA System configuration Loadlock Number of process chambers Substrate transfer Substrate holder Processes and sources Deposition sources Number of deposition sources Source orientation Vacuum system Base pressure Turbo molecular pump Backing pump Pump, loadlock evacuation Automatic or manual 3 Rotating revolver, under vacuum Fixed in rotating revolver For Ceramic MAXPHASE™ coating (others available on demand) 4 Top and bottom, for simultanuous double-sided deposition <1x10-5 Torr 2300 l/s...