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HASO EUV Wavefront Sensor Datasheet

HASO EUV Wavefront Sensor Datasheet
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Wavefront sensor The Hartmann From EUV to soft X-Ray Achromatic technology Vacuum compatible

HASO EUV APPLICATIONS Imagine Optic’s HASO EUV wavefront sensor was developed in collaboration with LOA laboratory and the SOLEIL synchrotron. It is the only device of its kind that offers you the extreme precision and direct measurement functionality needed for today’s most demanding laboratory and industrial applications. Designed and built in collaboration with our customers to meet their needs, the HASO EUV performs multiple functions. With it you can : + Align and characterize Synchrotron, EUV-FEL and laser-driven secondary source + Do micro- and nano-focusing + Diagnose dense plasma +...

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SPECIFICATIONS* OPERATING SPECS Aperture dimension Number of sub-apertures dedicated for analysis Minimum readout time Working photon energy (Wavelenght range) Operating system MISC Dimensions (Height x Width x Length) Weight Sensor type Working temperature Compliant vacuum (hydrocarbon free) Interface Power consumption OPTICAL SPECS Repeatability Wavefront measurement accuracy · In absolute mode · In relative mode Spatial sampling Tilt measurment sensitivity Focus dynamic range Numerical aperture Standard EUV 13 x 13 mm² 72 x 72 ~ 600 ms (2MHz digitalization) 30-300 eV (4-40 nm) Windows 10...

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SOFTWARE WAVEVIEWTM Metrology Software WAVEVIEWTM is the most advanced wavefront measurement and analysis software. It offers more than 150 features and tools optimized for a wide range of highly demanding applications. Options : + Extensions for PSF, MTF, M² and Strehl ratio + Optional SDK in C, LabVIEW and Python CONTACT US Imagine Optic Headquarters 18, rue Charles de Gaulle 91400 ORSAY · France Phone +33 (0)1 64 86 15 60 sales@imagine-optic.com www.imagine-optic.com

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