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- HASO EUV Wavefront Sensor Datasheet
HASO EUV Wavefront Sensor Datasheet
HASO EUV Wavefront Sensor Datasheet
- Patented rotated square technology for high resolution and wide dynamic range.
- Suitable for mono- and polychromatic beams.
- Hydrocarbon-free and vacuum compatible up to 10-7 mbar.
- Alignment and characterization of Synchrotron, EUV-FEL, and laser-driven secondary sources.
- Micro- and nano-focusing.
- Dense plasma diagnostics.
- Automatic alignment of EUV optical systems.
- EUV lithography.
- Analysis of gas or solid high-harmonic generation.
- Aperture dimensions: 13 x 13 mm² (Standard EUV) and 13.6 x 13.6 mm² (High NA EUV).
- Number of sub-apertures: 72 x 72 (Standard EUV) and 80 x 80 (High NA EUV).
- Minimum readout time: ~600 ms to 64 µs.
- Working photon energy: 30-300 eV (Standard EUV) and 25-250 eV (High NA EUV).
- Operating system: Windows 10.
- Repeatability: ~λ/200 RMS.
- Wavefront measurement accuracy: ~λ/50 RMS in absolute mode and ~λ/100 RMS in relative mode for Standard EUV.
- Spatial sampling: ~180 µm (Standard EUV) and ~170 µm (High NA EUV).
- Tilt measurement sensitivity: 0.05 µrad RMS (Standard EUV) and 0.1 µrad RMS (High NA EUV).
- Focus dynamic range: ±0.5 m to ±∞ (Standard EUV) and ±0.45 m to ±∞ (High NA EUV).
- Numerical aperture: 0.013 (Standard EUV) and 0.15 (High NA EUV).
- Dimensions: Ø 115 mm, L 270 mm (Standard EUV) and 276 x 102 x 114 mm³ (High NA EUV).
- Weight: 8 Kg (Standard EUV) and 3.3 Kg (High NA EUV).
- Working temperature: 15-30 °C.
- Interface: USB 2.0 (Standard EUV) and USB 3.0 (High NA EUV).
- Power consumption: 12 VDC, 60 W @ 12 VDC.
Catalog excerpts
Wavefront sensor The Hartmann From EUV to soft X-Ray Achromatic technology Vacuum compatible
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HASO EUV APPLICATIONS Imagine Optic’s HASO EUV wavefront sensor was developed in collaboration with LOA laboratory and the SOLEIL synchrotron. It is the only device of its kind that offers you the extreme precision and direct measurement functionality needed for today’s most demanding laboratory and industrial applications. Designed and built in collaboration with our customers to meet their needs, the HASO EUV performs multiple functions. With it you can : + Align and characterize Synchrotron, EUV-FEL and laser-driven secondary source + Do micro- and nano-focusing + Diagnose dense plasma + Align...
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SPECIFICATIONS* OPERATING SPECS Aperture dimension Number of sub-apertures dedicated for analysis Minimum readout time Working photon energy (Wavelenght range) Operating system MISC Dimensions (Height x Width x Length) Weight Sensor type Working temperature Compliant vacuum (hydrocarbon free) Interface Power consumption OPTICAL SPECS Repeatability Wavefront measurement accuracy · In absolute mode · In relative mode Spatial sampling Tilt measurment sensitivity Focus dynamic range Numerical aperture Standard EUV 13 x 13 mm² 72 x 72 ~ 600 ms (2MHz digitalization) 30-300 eV (4-40 nm) Windows 10 Ø...
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SOFTWARE WAVEVIEWTM Metrology Software WAVEVIEWTM is the most advanced wavefront measurement and analysis software. It offers more than 150 features and tools optimized for a wide range of highly demanding applications. Options : + Extensions for PSF, MTF, M² and Strehl ratio + Optional SDK in C, LabVIEW and Python CONTACT US Imagine Optic Headquarters 18, rue Charles de Gaulle 91400 ORSAY · France Phone +33 (0)1 64 86 15 60 [email protected] www.imagine-optic.com
Open the catalog to page 4All Imagine Optic catalogs and technical brochures
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