Liquid Source Vaporization Control Systems Digital Liquid Mass Flow Meter LF-F series Digital Liquid Mass Flow Controller LV-F series Injection System MV series MI series VC series Compact Baking System LSC series Liquid Auto Refill System

Liquid Source Vaporization Control Systems As semiconductor devices get faster and levels of integration increase, more detail is required in device construction, and new materials are being introduced into the 300 mm wafer production process to increase production efficiency. As a result of this trend, there is now a larger variety of liquid sources used in the semiconductor manufacturing process, and flow rates have increased as well. HORIBASTEC is the world leader in this area offering a full line up of liquid source vaporization control systems utilizing different methodologies including...

Liquid Source Vaporization Control Systems 02 Digital Liquid Mass Flow Meter/Controller Featuring the world's first sensor with a unique cooling method sOffer micro-liter to ultra low flow rate control. sEnable precision flow control of low boiling point and high viscosity liquids. sUltra clean. *Please confirm the external dimensions of the last page. sRoHS Compliance MI/MV series Mixed injection Vaporize liquids efficiently using the gas-liquid mixture vaporization method sThe gas-liquid mixture vaporization method enables stable vaporization of high boiling point liquids. sHighly efficient...

Compact Baking System Best-selling baking system model sPioneer liquid source vaporization control system that vaporizes liquids including ethyl silicate. sSuitable for large flow rate vaporization: Enables vapor generation of stable TEOS at 600SCCM. sEasy maintenance from the front of the unit. Basic flow Dimensions (mm) 159±2 144 Pneumatic valve Purge 1/4 inch VCR type male Outlet 3/8 inch VCR type male SEC Mass flow controller Source 1/4 inch VCR type male Drain 1/4 inch VCR type female Liquid Auto Refill System Safe, efficient, and continuous, uninuous supply of liquid sources to vaporization...

Liquid Source Vaporization Control Systems 04 LF-F/LV-F series Model Flow Range (g/min) RoHS Compliance Measurement Range Application Liquid*1 All liquids except those corrosive to stainless steel (ex, HCl and HF) Repeatability Less than 3sec (T98) Response speed 5 to 50°C (Accuracy Guaranteed 15 to 45°C) ± 0.1%F.S./°C MAX± 1% Temperature coefficiency Operating Pressure*5 Max. 5MPa (as flow meter) / 50 to 300kPa (with piezo control valve) Pressure Resistance Pressure Drop Flow Rate Signal Power Supply Leak Integrity Wetted Material 1/16,8,4inch compression fitting, 1/18,4 inch VCR type Standard...

LIQUID Measurement principles s Cooling measurement method The flow rate sensor in the LF-F/LV-F series of fine mass flow controllers for liquids consists of an electronic cooling element (Peltier element) that is in contact with a capillary tube, as well as several temperature detection elements. When the liquid is flowing, the sensor detects the temperature rise (∆T) corresponding to the flow rate and displays it as a flow rate. Unlike methods where heat is added, this cooling method enables flow rate measurement of liquids with low boiling points. It also prevents problems with interference...

Liquid Source Vaporization Control Systems 06 Safe, efficient, and continuous, uninuous supply of liquid sources to vaporization systems Automatic supply The LU-A1000 series liquid material refill system provides automatic,safe,waste-free material supply to liquid material baking systems (LSC series) and injection systems (MI,MV,VC series) HORIBA STEC has amassed a great deal of technical know-how in the precise measurement, control, and vaporization of liquids. We offer equipment for a wide range of fields, so whether you need to deal with liquid chemicals in the semiconductor manufacturing...

External dimensions sLF-F/LV-F series 1/4inch VCR 1/4inch Swagelok 1/8inch VCR 1/8inch Swagelok 1/16inch Swagelok 1/16inch Special Please request other external dimension drawings from HORIBA STEC. * Equivalent joints are sometimes used instead of the ones listed. Please read the operation manual before using this product to ensure safe and proper handling of the product. G The contents of this catalog are subject to change without prior notice, and without any subsequent liability to this company. G It is strictly forbidden to copy the content of this catalog in part or in full. G All brand...