UV Visible Spectroscopic Ellipsometer UVISEL Spectroscopic Ellipsometer from VUV to NIR
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péÉÅíêçëÅçéáÅ mÜ~ëÉ jçÇìä~íÉÇ bääáéëçãÉíÉê Thin Film, Surface and Interface Characterization

Film Thickness Accurate thin film measurement from a few angstroms to several microns • For single layer or complex multilayer stacks High sensitivity to ultra-thin films Utra thin film on glass substrate - Ultra-thin monolayer Fused silica substrate High resolution monochromator configuration Change in signal for 10 A thick monolayer at the Brewster angle Dielectric layer on glass substrate Ultra-thick dielectric Complex multilayer stack analysis Optically pumped semiconductor laser structure • Refractive index (n) and extinction coefficient (k) from the far-UV to near-IR for complex...

Composition / crystallinity Film uniformity by area and depth Material Properties Inhomogeneity over depth: material proportion determination using EMA OPSL layer Native Oxide Excellent correlation between Automated sample mapping for area uniformity • Non-destructive technique • Highly accurate & reproducible semi-transparent medium • No reference material necessary Very sensitive, especially to ultra-thin • Simultaneous multiple parameter • Measures data at wavelength of

Oxides, nitrides, oxinitrides Thin NO capacitors, ONO, OPO, ONOPO • Thickness monitoring • Growth and etch rates • Endpoint detection •Alloy composition • Surface damage Filter application And Any Application That Needs Thin Film • Data storage CD-R, CD-RW, DVD-R, DVD-RW Magneto-optic materials (Faraday or Kerr effect) • Non linear optical devices

UVISEL Flexibility Combined with High Performance The UVISEL Spectroscopic Phase Modulated Ellipsometer is a unique instrument that delivers the highest accuracy and precision for demanding research and industrial QC applications. It covers a wide spectral range from 190 to 2100 nm, with a complete application database included in the software. UVISEL - Bench top configuration • Ex-Situ Configuration The UVISEL instrument is highly featured and integrates high stability electronic systems with advanced software capabilities. It is possible to automate the instrument to enhance its...

Thin Film Production Control ^ Fast, Accurate and Stable to Ensure High Yields in Quality and Quantity The UT-300 and FF-1000 instruments have been developed to provide specific process control solutions for the semiconductor and flat panel display industries. These accurate, automated thin film metrology tools deliver both unique performance and proven reliability for on-line quality control of production processes. Equipped with achromatic microspot optics, wafer handling system, autofocus and pattern recognition software the UT-300 - Fully Automatic Ultra Thin Film Analyzer - accurately...

^\ Phase Modulated Ellipsometry Unequalled Capabilities for Accurate Ultra-Thin Film Characterization Ellipsometry is based on the measurement of the light polarization change upon reflection from a sample surface or interface. The experimental data are usually expressed as two parameters \\i and A, which are related to the Fresnel reflection coefficients by: These two coefficients contain information related to material optical properties and physical dimensions Spectroscopic ellipsometry measures this complex ratio p as a function of wavelength. Three Key Factors for Success • The Most...

DeltaPsi2 Advanced Spectroscopic Ellipsometry Software Powerful DeltaPsi2 Windows™ based software makes full use of all the benefits provided by state-of-the-art HORIBA Jobin Yvon ellipsometry hardware. The largest variety of advanced modelling functions gives research engineers the full performance of ellipsometric analysis. A simple user interface allows the operator to perform routine tasks very easily. Key Features • Acquisition and analysis of ellipsometric, kinetic, transmission and reflection data • Advanced mathematical fitting algorithms • Bibliographic reference database -...

Company Profile HORIBA Jobin Yvon have been manufacturing state-of-the-art thin film characterization instruments, spectrometers and optical components for over 185 years with results that have set spectroscopy and analytical standards worldwide. HORIBA Jobin Yvon instruments are manufactured under a strict quality assurance program to satisfy customer requirements with instrumentation of the highest level of reliability and performance. The Thin Film Division of HORIBA Jobin Yvon offers a wide range of instruments dedicated to advanced thin film metrology, processing and plasma diagnostics...

Service and Application Support A Worldwide Experienced Service Team for Your Technical Support HORIBA Jobin Yvon offers a complete range of service and preventative maintenance plans to fit your needs and for your complete satisfaction. Purposes of this contract are : • System installation • Technical training for a smooth and carefree start up • Regular preventative maintenance actions to keep your instrument in its best working condition Our staff of highly trained service and application engineers stand ready to provide assistance when and where you need it. • Application training...

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