ru1000
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Global Support The HORIBA Group's world-wide network ensures world-classs support for our customers. HORIBASemiconductor FRANCE HORIBA France Sari, Grenoble Office BURO club Gieres, 2 Avenue de Vignate 38610 Gieres, France PHONE: (33)4-76-63-4915 FAX: (33)4-76-54-0399 GERMANY HORIBA Europe GmbH Zur Wetterwarte 10 Haus 109 01109 Dresden Germany PHONE: (49)351 -889-6807 FAX: (49)351 -889-6808 SINGAPORE HORIBA Instruments (Singapore) Pte. Ltd. 10 Ubi Crescent, Lobby B #05-11/12 Ubi tech park Singapore 408564 PHONE: (65)6-745-8300 FAX: (65)6-745-8155 CHINA HORIBA (China) Trading Co., Ltd. Room 1701, United Plaza 1468 Nanjing Rd. West Shanghai 200040 China PHONE: (86)21 -3222-1818 FAX: (86)21 -6289-5553 Beijing Office Room 1801, SK Tower .Tower 1 No. 6Jia, Jianguomenwai Ave. Chaoyang District Beijing 100022, China PHONE: (86)10-8567-9966 FAX: (86)10-8567-9066 Shanghai Office 701 Room, A6th Building, FuTong TianJun Garden, Western HePing Road, LongHuaTown, BaoAn District, Shenzhen City, GuangDong Provience 518000, China PHONE: (86)755-2967-1203 FAX: (86)755-2967-1192 Shanghai Service Center Rm.303, No.84, Lane887, Zu-chong-zhi Rd., Zhangjiang Hi-tech Park, Shanghai 201203, China PHONE: (86)21-5131-7150 FAX: (86)21-5131-7660 KOREA CHINA Jt TAIWAN World-wide Network TAIWAN HORIBA Taiwan, Inc. 3F., No. 18, Lane 676, Jhonghua Rd., Jhubei City, Hsinchu County 302, Taiwan (R.O.C.) PHONE: (886)3-656-1160 FAX: (886)3-656-8231 Tainan Office IF., No.117, Chenggong Rd., ShanhuaTownship, Tainan County 741, Taiwan (R.O.C.) PHONE: (886)6-583-4592 FAX: (886)6-583-2409 U.S.A. HORIBA Instruments Incorporated Santa Clara Office 3265 Scott Boulevard Santa Clara, CA 95054 PHONE: (1)408-730-4772 FAX: (1)408-730-8975 Austin Office 9701 Dessau Rd., Suite 605, Austin, TX 78754 PHONE: (1)512-836-9560 FAX: (1)512-836-8054 Portland Office 10110 SW Nimbus Ave.Suite L-5,Portland, OR 97223 PHONE: (1)503-624-9767 FAX: (1)512-539-4823 Reno Office (R&D Center) 605 Spice Island Drive, #5, Sparks, NV 89431 PHONE: (1)775-358-2332 FAX: (1)775-358-0434 New Hampshire Office 315 Derry Road, Suite 13 Hudson, NH 03051, U.S.A. PHONE: (1)603-886-4167 FAX: (1)603-886-4267 KOREA HORIBA STEC Korea, Ltd. 110, Suntech-City, 513-15, Sangdaewon-Dong, Jungwon-Ku, Sungnam-City, Kyungki-Do, 462-725, Korea PHONE: (82)31 -777-2277 FAX: (82)31 -777-2288 U.K. HORIBA UK Limited Kyoto Close, Summerhouse Rd., Moulton Park, Northampton NN3 6FL England PHONE: (44)1604-542-600 FAX: (44)1604-542-696 /j\ Please read the operation manual before using this product to ensure safe and proper handling of the product. •The contents of this catalog are subject to change without prior notice, and without any subsequent liability to this company. • It is strictly forbidden to copy the content of this catalog in part or in full. •All brand names, product names and service names in this catalog are trademarks or registered trademarks of their respective companies. • DeviceNet is the trademark of Open Device Net Vendors Association, Inc. HORIBASTEC HORIBA STEC, Co., Ltd. http://www.horiba-stec.jp/e. Head Office 11-5, Hokodate-cho, Kamitoba, Minami-ku, Kyoto, 601-8116 Japan PHONE: (81)75-693-2300 FAX: (81)75-693-2350 Excellent Plasma Control over Reactive Sputtering Plasma Emission Controller RU-1000 The superb feedback control of the reactive gas flow in a reactive sputtering process helps you enhance product quality and achieve greater productivity by monitoring the plasma generated by sputtering or the voltage of the power supply for the sputtering process. • Faster deposition by controlling the transition region • Optimized distribution in a large-area, high-capacity chamber • Plasma stabilization in a long sputtering process (stable deposition) • Mixture optimization of compounds for reactive sputtering Explore the future Automotive Test Systems I Process & Environmental I Medical I Semiconductor I Scientific HORIBA Explore the future Automotive Test Systems I Process & Environmental I Medical I Semiconductor I Scientific HORIBA

The optical technology developed by HORIBA and the gas control technology offered by HORIBA STEC have joined forces to make further advances in plasma control technology. From plasma emission detection to gas flow, experience the latest control technologies pioneered by HORIBA STEC. The RU-1000 plasma emission controller achieves excellent spatial distribution of deposition on substrates with large surface areas. Reactive sputtering is performed for film deposition on films and glass substrates used for touch panels. This method is employed to form a deposited film by chemical reactions...

HORIBA & HORIBASTEC INNOVATION Condition control of the vacuum chamber RU-1000 Functional glass Mass flow controllers Reactive sputtering with functional films or functional substrates is performed in a continuous process for a prolonged period of time. Stable film deposition processes require real-time measurement of the changing conditions inside the vacuum chamber and the plasma emission, as well as adequate control of the flow rate of the reactive gas being introduced according to the degree of the changes. Any process for depositing multi-layer films involves the need for increased...

HORIBA & HORIBASTEC INNOVATION External dimension drawing HORIBA & HORIBASTEC INNOVATION Main controller unit RU-1000 Input signal Input signal Collimator RU-1000C-01/02 Flange for PMT unit RU-1000F-01/02 RU-1000C-01 (Straight Type) (Angle Type) (Normal Type) (Direct connection type) A category temperature range and the humidity range. A category temperature range and the humidity range. Cable RU-1000H Optical fiber RU-1000 O Name Efficient capture of plasma emission Installation example • One PC can monitor up to 10 units of plasma emission controllers. • One plasma emission controller...