MICROPOLE™ System Quadrupole Mass Complying with all RoHS regulations The Corporate Social Responsibility (CSR) of companies involves, among other things, working to protect the environment. As a company within the HORIBA Group, a leader in environmental analysis equipment, HORIBASTEC is always striving to develop and manufacture environmentally sound products. RoHS regulations: RoHS stands for "Restriction of Hazardous Substances", and is a set of regulations enforced in the EU to limit the use of six hazardous substances (lead, mercury, cadmium, hexavalent chromium, polybrominated biphenyls (PBBs), and polybrominated diphenyls (PBDEs)), in electric and electronic components. Compact size Higher pressure capabilities Exchangeable sensor head User friendly interface Complying with CE marking
Open the catalog to page 1The Micropole™ Residual Gas Analyzer Is one of the smallest complete mass spectrometer systems available. The compact size Is achieved by the patented design of miniature array of quadrupole mass filters. The array offers similar or greater sensitivity than conventional mass spectrometers but in a fraction of the volume. The system is capable of operating at much higher pressures than traditional systems, so the need for additional differential pumping equipment is removed. The sensors are factory pre-tuned and calibrated against transfer standards which allows direct interchangeability of the...
Open the catalog to page 2Base pressure Internal leak check (valve leak) Measure contamination Real time monitoring in vacuum chamber of Process gas External leak check chamber cleaning amoer condition monitoring Quality control with physical data Improve process understanding Yield enhancement Failure analysis Increase uptime Reduce time for cham Reduce expensive gas usag Anticipate Preventative maintenance action ce cost and increase outpu
Open the catalog to page 3External Dimensions Unit: mm Single Monitoring Communication Cable Multiple Monitoring Communication Cable Communication Cable Stand Alone Smart & Compact Single system Control Monitoring & Control Communication Cable Multiple system Control Monitoring & Control Communication Cable Multiple system control.
Open the catalog to page 5Bar indications at measured mass ranges Analog scan graph Plot indications at measured mass ranges Trend graph Changing partial pressure indications (can select 10 AMU) for time Please read the operation manual before using this product to ensure safe and proper handling of the product. > The contents of this catalog are subject to change without prior notice, and without any subsequent liability to this company. »It is strictly forbidden to copy the content of this catalog in part or in full. I All brand names, product names and service names, in this catalog are trademarks or registered trademarks...
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