Pressure Controllers Automatic pressure regulators UR-7300/Z704 series Piezo actuator valves PV-1000/2000 series Exhaust pressure controllers

Pressure Controllers HORIBA STEC’s mass flow controllers are renowned for their precise flow rate control of fluids, and have the number one share in the worldwide market. HORIBA STEC has applied the technology it developed in creating its mass flow controllers to a new field, pressure control. HORIBA STEC’s lineup of pressure control systems includes the UR-7300 series of ultra clean automatic pressure regulators; the GR-100 series, which is the world’s smallest class of wafer back side cooling systems and was developed in collaboration with mass flow controller engineers; the EC series of exhaust...

Automatic pressure regulator The UR-7300 series automatic pressure regulators are electronic regulators with high-precision pressure sensors and high resolution, fast response piezo actuator valves. They control the pressure relative to the electric signal (0 to 5 VDC) that they receive from an external control. The all-metal construction of the gas contact area (M type) makes these units ideal for ultra-clean pressure control of ultra-pure gas supply systems and active gas lines. sUltra clean: All metal construction (M type) sFast response: Response speed: Within 0.5 sec. sFlexible design: These...

Valve state when there is no electric current (Normal valve state) Gas Gauge pressure type: 20 to 950 kPa (G) 10 to 500 kPa (G) Absolute pressure type: 10 to 300 kPa (A) Pressure control range Pressure adjustment valve flow rate N2 equivalent F.S. flow rate value Gauge pressure type: 20 to 950 kPa (G) 10 to 500 kPa (G) Absolute pressure type: 10 to 300 kPa (A) Gauge pressure type: 20 to 950 kPa (G) 10 to 500 kPa (G) *2 Absolute pressure type: 10 to 300 kPa (A) Pressure conditions: One-dimensional pressure 50 kPa (G); two-dimensional pressure atmospheric pressure [1013 hPa (A)] Under the pressure...

RoHS Directive compliant UR-Z714(-UC)(-B) Valve state when there is no electric current (Normal valve state) Gas Gauge pressure type: 20 to 950 kPa (G) 10 to 500 kPa (G) * For the (-B) type, only 10 to 500 kPa is supported Absolute pressure type: 10 to 300 kPa (A) 7.5 to 150 kPa (A) Gauge pressure type: 20 to 950 kPa (G) 10 to 500 kPa (G) Absolute pressure type: 10 to 300 kPa (A) 7.5 to 150 kPa (A) Pressure control range Pressure adjustment valve flow rate N2 equivalent F.S. flow rate value Pressure conditions: One-dimensional pressure 50 kPa (G); two-dimensional pressure atmospheric pressure...

UR-7300/Z704 series sFast, accurate pressure adjustment when the source pressure changes The primary source pressure changes abruptly. With traditional pressure adjustment equipment, this might have an effect on the secondary pressure in the mass flow controller due to issues with responsiveness and pressure adjustment characteristics. Furthermore, in extremely small flow rate ranges, a phenomenon described as hunting may occur due to problems with the pressure adjustment resolution. The high-precision, highly-responsive UR series offers accurate, stable pressure control. With traditional methods...

EC-5000 series sSpin coater/developer processing sDiffusion/heat oxidation processing · For vertical furnaces, especially phosphor diffusion. Ideal for pyrogen oxidation. · PTFE type for high temperatures. Suitable for corrosive gases. · Corrosion-resistant pressure sensors also available. Mass flow controller Factory duct Ball valve Pressure sensor Diffusion furnace When the exhaust flow rate is adjusted to optimal levels: · The resist is distributed in an even film. · Secondary deposition of the mist is prevented. · The diffusion of dangerous vapor is prevented. Furthermore, there is less change...

Panel cut dimensions (1/2) (Conforming panel widths: 1 to 3.5) KOREA HORIBA STEC KOREA, Ltd. 110, Suntech-City, 513-15, Sangdaewon-Dong, Jungwon-Ku, Sungnam-City, Kyungki-Do, 462-725 Korea PHONE: (82)31-777-2277 FAX: (82)31-777-2288 CHINA HORIBA TRADING (SHANGHAI) Co., Ltd. Room 1701, United Plaza 1468 Nanjing Rd. West Shanghai 200040 CHINA PHONE: (86)21-3222-1818 FAX: (86)21-6289-5553 SHANGHAI Service Center Rm.303, No.84, Lane887, Zu-chong-zhi Rd., Zhangjiang Hi-tech Park, Shanghai 201203, CHINA PHONE: (86)21-5131-7150 FAX: (86)21-5131-7660 ● The contents of this catalog are subject to change...