MI/MV Vaporizer Specifications Model All liquids except those corrosive to stainless steel (ex. HCl, HF) Liquid Material Liquid Material Example generated flow rate: TEOS(to 7g/min), IPA(to 3cc/min) Heater Heater Wetted parts Wetted parts MV-1000 All liquids except those corrosive to stainless steel (ex. HCl, HF) Max. 5.0 CCM conversion (liquid phase conversion) Control Valve: 120V(100W) / 208V(100W) / 240V(100W) available Vaporizer: 120V(100W) / 208V(100W) / 240V(100W) available SUS316L,PFA Setting Temperature Setting Temperature Control Valve: Max 140°C Vaporizer: Max 200°C Temperature Sensor Temperature Sensor Thermocouple K type (Control valve, Vaporizer) Temperature Switch High limit 2450RC 160°C (ELMWOOD) NC type Temperature Switch Control Valve: High limit 2450RC 160°C(ELMWOOD) NC type Vaporizer: High limit 2450RC 250°C(ELMWOOD) NC type External leak Less than 1 to 10 Pa·m /s (He) Control Valve: Less than 1 to 10-6 Pa·m3/s (He) External leak Leak Integrity Air Valve Option: Less than 1 to 10-9 Pa·m3/s (He) Control Valve: Less than 1 to 10-6 Pa·m3/s (He) Leak Integrity Liquid Inlet 1/8inch VCR type Male Standard Fitting Vaporizer: Less than 1 to 10-9 Pa·m3/s (He) Gas Inlet 1/4inch VCR type Female Liquid Inlet 1/8inch VCR type Male Gas Outlet 1/4inch VCR type Male Operating Temperature Pressure Resistance Option Weight (exclude cable) Standard Fitting 15°C to 50°C 1.0MPa (G) Pneumatic valve 620 ± 10g (Standard Type), 700 ± 10g (Air Valve Option Type) Gas Inlet 1/4inch VCR type Female Gas Outlet 1/2inch VCR type Male Operating Temperature Pressure Resistance Option Weight (exclude cable) 15°C to 50°C 1.0MPa (G) Pneumatic valve 1110 ± 10g (Standard Type), 1190 ± 10g (Air Valve Option Type) MI/MV Series Web Ver.001 Subject to chang