*mydirectindustry

MI/MV

Product catalog summary

Specifications Overview:
The MI-1000 and MV-1000 models are designed for vaporizing all liquids except those corrosive to stainless steel, such as HCl and HF. They feature a generated flow rate for TEOS up to 7g/min and IPA up to 3cc/min. The control valve, heater, and vaporizer are available in 120V, 208V, and 240V, each with a power rating of 100W.

Material and Construction:
Wetted parts are made from SUS316L and PFA, ensuring durability and resistance to corrosion. The liquid inlet is a 1/8 inch VCR type male, while the gas inlet and outlet are 1/4 inch VCR type female and male, respectively.

Temperature and Pressure Specifications:
The maximum setting temperature for the control valve is 140°C, while the vaporizer can reach up to 200°C. Both models use a K type thermocouple for temperature sensing. The high limit temperature switch is set at 160°C for the control valve and 250°C for the vaporizer. Operating temperatures range from 15°C to 50°C, with a pressure resistance of 1.0MPa (G).

Leak Integrity and Options:
The external leak rate is less than 1 to 10^-8 Pa·m³/s for the vaporizer and less than 1 to 10^-6 Pa·m³/s for the control valve. An air valve option offers a leak rate of less than 1 to 10^-9 Pa·m³/s. A pneumatic valve option is also available.

Weight and Additional Features:
The standard type weighs 620 ± 10g, while the air valve option type weighs 700 ± 10g. The MV-1000 model weighs 1110 ± 10g for the standard type and 1190 ± 10g for the air valve option type.

Note:
Specifications are subject to change without notice.

Catalog excerpts

MI/MV Vaporizer Specifications Model All liquids except those corrosive to stainless steel (ex. HCl, HF) Liquid Material Liquid Material Example generated flow rate: TEOS(to 7g/min), IPA(to 3cc/min) Heater Heater Wetted parts Wetted parts MV-1000 All liquids except those corrosive to stainless steel (ex. HCl, HF) Max. 5.0 CCM conversion (liquid phase conversion) Control Valve: 120V(100W) / 208V(100W) / 240V(100W) available Vaporizer: 120V(100W) / 208V(100W) / 240V(100W) available SUS316L,PFA Setting Temperature Setting Temperature Control Valve: Max 140°C Vaporizer: Max 200°C Temperature Sensor Temperature Sensor Thermocouple K type (Control valve, Vaporizer) Temperature Switch High limit 2450RC 160°C (ELMWOOD) NC type Temperature Switch Control Valve: High limit 2450RC 160°C(ELMWOOD) NC type Vaporizer: High limit 2450RC 250°C(ELMWOOD) NC type External leak Less than 1 to 10 Pa·m /s (He) Control Valve: Less than 1 to 10-6 Pa·m3/s (He) External leak Leak Integrity Air Valve Option: Less than 1 to 10-9 Pa·m3/s (He) Control Valve: Less than 1 to 10-6 Pa·m3/s (He) Leak Integrity Liquid Inlet 1/8inch VCR type Male Standard Fitting Vaporizer: Less than 1 to 10-9 Pa·m3/s (He) Gas Inlet 1/4inch VCR type Female Liquid Inlet 1/8inch VCR type Male Gas Outlet 1/4inch VCR type Male Operating Temperature Pressure Resistance Option Weight (exclude cable) Standard Fitting 15°C to 50°C 1.0MPa (G) Pneumatic valve 620 ± 10g (Standard Type), 700 ± 10g (Air Valve Option Type) Gas Inlet 1/4inch VCR type Female Gas Outlet 1/2inch VCR type Male Operating Temperature Pressure Resistance Option Weight (exclude cable) 15°C to 50°C 1.0MPa (G) Pneumatic valve 1110 ± 10g (Standard Type), 1190 ± 10g (Air Valve Option Type) MI/MV Series Web Ver.001 Subject to chang

Open the catalog to page 1

All HORIBA STEC catalogs and technical brochures

*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.

Brand list