Digital Mass Flow Controller Digital/Analog model Fitting to to fitting Fitting fitting DeviceNet™ model High-speed response 1 second response at any setpoint RoHS compliant product

A variety of communication, fitting-to-fitting dimensions and flow control ranges to suit customer needs. HORIBA STEC has built an enviable reputation in markets throughout the world by delivering products with superior performance specifications and excellent reliability. The SEC-N100 Series of mass flow controllers from HORIBA STEC is designed for use in a wide range of applications ranging from the controlled delivery of process gases for solar cell manufacturing to high accuracy bench-top gas blending. Our considerable experience and expertise in the measurement and control of gases for all...

Sensor output High accuracy High S.P. accuracy MFC’ s linearity is compensated using a polynomial approximated curve. This achieves high accuracy for all flow control ranges. Each process gas is individually characterized in the HORIBA STEC standard gas measurement system using the actual gas - not a reference or surrogate gas. Flow rate High-speed response throughout the flow rate range SEC-N100 Series uses the latest “Variable PID system”, which enables 1 second response to all set-points. This system changes the PID continuously for optimum Flow rate Control signal Flow rate Signal New variable...

Product specifications Common specifications SEC-N112MGM(W) SEC-N112MGR(W) SEC-N122MGM(W) SEC-N122MGR(W) Mass Flow controller model Mass Flow meter model Full-scale flow rate (N2 conversion flow rate) Valve type C: Normally close / O: Normally open Flow rate at fully closed control valve Flow rate control range Flow rate measuring range (SEF) Accuracy 0-100% of F.S. ±1.0% S.P. (Flow rate > 35% F.S.) ±0.35% F.S. (Flow rate ≤ 35% F.S.) ±1.0% S.P. (Flow rate > 30% F.S.) ±0.3% F.S. (Flow rate ≤ 30% F.S.) Operating temperature 5 to 50°C (recommended temperature range: 15 to 45°C ) ≤1 second: over...

Selecting a model model PROFIBUS communication: voltage/current select Blank : applicable with SEC-N102(W) and SEC-N104(W) A : setting/output signal 0~5 V DC B : setting/output signal 0~10 V DC C : setting/output signal 4~20 mA Multi-range, multi-gas (MR, MG) numbers Please specify MR, MG numbers. For details, please see the specifications below. Full-scale flow rate Please specify full-scale flow rate. Joint 4CR: 1/4 VCR male type fitting (applicable with SEC-N11X and SEC-N12X) 8CR: 1/2 VCR male type fitting (applicable with SEC-N13X and SEC-N14X) 4IS : 1/4 Swagelok male type fitting (applicable...

Connector examples Analog communication SC-EAH series signal cable flow rate flow rate signal output signal 0.1 5 V DC 0 5 V DC 0.1 5 V DC 0 5 V DC 0.2 10 V DC 0 10 V DC 4.32 20 A 4 20 mA Flow rate setting signal Flow rate output signal Valve voltage monitor Using various functional power control unit, PE-S7 SC-EDH series signal cable Flow rate, integration output Flow rate, integration alarm (minimum/maximum) Using an external power source and control signal Valve control signal: fully close/fully open Power supply ±15 V DC External control mode Flow rate setting Valve fully open/fully close...

Digital/Analog model DeviceNet™ model PROFIBUS/Analog model Flow Name Digital transmission connector RS-485 communication. Daisy chain connection is available For DeviceNet™ communication. Shield Micro-connector PROFIBUS Connector For PROFIBUS communication ZERO adjust switch Analog connector Provision of power supply. For analog transmission Transmission setting switch Transmission speed setting Address setting switch It is possible to set in the range of ZERO adjust switch Switch for correcting ZERO-point ZERO adjust switch Switch for correcting ZERO-point Address setting switch Address setting...

Dedicated Accessories Multifunctional controller The PE-S7, which comes with a program setting function, a preset function, and an integration function, is a RoHS-compliant multifunctional controller. Its front control panel offers improved ease of use. •Multi-range solution • flow rate setting function/6 presets • program control function • flow rate display • integration flow rate alarm function. external output: open connector • soft-start function, soft-start: <6 second, slow-start: <1200 second • flow rate output signal: 0 to 5 V DC external control function, flow rate setting signal input,...