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HORIBA STEC
Mass flow Controller & Meter

Mass flow Controller & Meter

Product catalog summary

Overview: The document provides a comparison of various mass flow controllers and meters, highlighting their features, specifications, and capabilities. The models discussed include the CRITERION D500, SEC-Z700X, SEC-Z500X Series, SEC-E Series, SEC-8000 F/D/E Series, and SEC-N100 Series.

Product Features:

CRITERION D500: Offers top accuracy and repeatability with a dynamic control range from 0.2% to 100%. It includes self-diagnostics and a programmable, pressure-insensitive mass flow module.
SEC-Z700X: Known for high accuracy and repeatability, featuring a programmable, pressure-insensitive mass flow module.
SEC-Z500X Series: Widely used programmable mass flow controller and meter.

Specifications:

Accuracy: Generally +/- 1% S.P. for most models, with variations depending on the full-scale flow rate.
Power Supply: Typically +/- 15VDC, with some models supporting 24VDC for specific interfaces.
Control Interface: Options include Analog (0 - 5 VDC) and Digital (RS-485 F-NET), with support for DeviceNET™, EtherCAT®, and other protocols.
Pressure Reading: Some models support multi-gas/multi-range/multi-pressure capabilities.
Self Diagnostics: Available in select models.
Fitting and Seal Material: Options include VCR, IGS, Swagelok, with metal or elastomer seals.
Valve Type: Typically piezoelectric or solenoid, with normally closed or open configurations.
Mounting: Most models are mount-free.
Full Scale Flow Rate: Ranges from 5 SCCM to 1000 SLM depending on the model.
Temperature Range: Varies from 5°C to 120°C across different models.

Recommendations: The document suggests consulting the product specification sheet for detailed information as some models may vary.

Catalog excerpts

Explore the future Automotive Test Systems I Process & Environmental I Medical I Semiconductor I Scientific 1 24VDC is available for DeviceNet™ and EtherCAT® *2 24 VDC is available for DeviceNet™, CC-Link®, EtherCAT® and PROFIBUS™ models. This table is a guideline only. Some models vary. Please see product specification sheet for more details.

Open the catalog to page 1

Mass flow Controller & Meter Comparison Model Automotive Test Systems I Process & Environmental I Medical I Semiconductor I Scientific 1 24VDC is available for DeviceNet™ and EtherCAT® *2 24 VDC is available for DeviceNet™, CC-Link®, EtherCAT® and PROFIBUS™ models. This table is a guideline only. Some models vary. Please see product specification sheet for more details.

Open the catalog to page 2

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.

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