LF-F Series Liquid Flow Meter Specification Model Flow Range (g/min) Measurement Range Application Liquid*1 Viscosity*2 Accuracy*3 Linearity Repeatability Response Operating Temperature*5 Temperature coefficiency Operating Pressure*6 Pressure Resistance Pressure Drop*7 Flow Rate Signal Power Supply Leak Integrity Wetted Material Standard Fitting 5 to 100% F.S. All liquids except those corrosive to stainless steel (ex, HCl and HF) ± 0.1%F.S./°C max± 1% Max. 5MPa (as flow meter) / 50 to 300kPa (with piezo control valve) 10MPa (as flow meter) max. 500Pa Analog: 0 to 5 VDC Digital: RS485 +15 V ± 5%, 200 mA -15 V ± 5%, 200 mA -12 3 5 x 10 Pa·m /s (He) SUS316L, Ni 1/8" compression 1/4" compression 1/16" , 1/8" compression fitting, 1/8" VCR type fitting 1/8" VCR fitting 1/4" VCR type type *1 With the LF-F/LV-F Series, flow rate calibration is performed using one specified type of liquid. (Please indicate the type of liquid to be used when ordering the device.) - Liquids containing solid materials cannot be measured. - Please consult us in advance if you plan to use these devices with liquid mixture for which the mixture ratio may vary. - With the LV-F Series, if the liquid to be measured contains particle etc., please install a 0.2 µm (Abs) filter on the primary side. *2 The LV-F Type can be used with a maximum viscosity of 0.01Pa·s depending on the flow rate range. Please consult us in advance if you plan to use this device with high-viscosity liquids. *3 Specification of accuracy, linearity and repeatability is guaranteed against calibrated liquid based on SEMI E561296. *4 It is the specification which is adjusted by Auto-PID function with our piezo control valve. *5 In order to ensure precise measurement, please maintain incoming liquid temperature to be within 10 deg.C lower or 3 deg.C higher than the ambient temperature. *6 Specification of Operating Pressure is the pressure range when liquid viscosity is 0.001Pa·s. *7 Specification of pressure drop is when liquid (with viscosity of 0.001Pa·s) is introduced at 100% F.S. of measurement point. LF-F Series Web Ver.001 Subject to change wit