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LF-F series

LF-F series

Product catalog summary

Overview: The LF-F Series Liquid Flow Meters are designed for precise measurement of liquid flow rates across various models (LF-F20M-A to LF-F60M-A) with different flow ranges. These meters are suitable for non-corrosive liquids and offer high accuracy and repeatability.

Specifications:

Flow Range: Varies by model, from 0.02 g/min to 100 g/min.
Measurement Range: 5 to 100% Full Scale (F.S.).
Accuracy and Linearity: ±0.5% F.S., guaranteed against calibrated liquid based on SEMI E56-1296 standards.
Repeatability: ±0.5% F.S.
Response Time: Less than 3 seconds (T98).
Operating Temperature: 5 to 50°C, with a temperature coefficiency of ±0.1% F.S./°C.
Operating Pressure: Max 5MPa as a flow meter, 50 to 300kPa with piezo control valve.
Pressure Resistance: Up to 10MPa.
Pressure Drop: Max 500Pa at 100% F.S. with a liquid viscosity of 0.001Pa·s.
Flow Rate Signal: Analog (0 to 5 VDC) and Digital (RS485).
Power Supply: +15 V ± 5%, 200 mA and -15 V ± 5%, 200 mA.
Leak Integrity: 5 x 10^-12 Pa·m³/s (He).
Wetted Material: SUS316L, Ni.
Standard Fitting: 1/8" and 1/4" compression fittings, 1/8" and 1/4" VCR type.

Application Notes:

Flow rate calibration is performed using one specified type of liquid. Liquids containing solid materials cannot be measured.
For liquids with particles, a 0.2 µm filter is recommended on the primary side.
Consultation is advised for high-viscosity liquids or liquid mixtures with varying ratios.

Limitations: Not suitable for liquids corrosive to stainless steel, such as HCl and HF.

Additional Information: Subject to change without notice. For further details, visit the manufacturer's website.

Catalog excerpts

LF-F Series Liquid Flow Meter Specification Model Flow Range (g/min) Measurement Range Application Liquid*1 Viscosity*2 Accuracy*3 Linearity Repeatability Response Operating Temperature*5 Temperature coefficiency Operating Pressure*6 Pressure Resistance Pressure Drop*7 Flow Rate Signal Power Supply Leak Integrity Wetted Material Standard Fitting 5 to 100% F.S. All liquids except those corrosive to stainless steel (ex, HCl and HF) ± 0.1%F.S./°C max± 1% Max. 5MPa (as flow meter) / 50 to 300kPa (with piezo control valve) 10MPa (as flow meter) max. 500Pa Analog: 0 to 5 VDC Digital: RS485 +15 V ± 5%, 200 mA -15 V ± 5%, 200 mA -12 3 5 x 10 Pa·m /s (He) SUS316L, Ni 1/8" compression 1/4" compression 1/16" , 1/8" compression fitting, 1/8" VCR type fitting 1/8" VCR fitting 1/4" VCR type type *1 With the LF-F/LV-F Series, flow rate calibration is performed using one specified type of liquid. (Please indicate the type of liquid to be used when ordering the device.) - Liquids containing solid materials cannot be measured. - Please consult us in advance if you plan to use these devices with liquid mixture for which the mixture ratio may vary. - With the LV-F Series, if the liquid to be measured contains particle etc., please install a 0.2 µm (Abs) filter on the primary side. *2 The LV-F Type can be used with a maximum viscosity of 0.01Pa·s depending on the flow rate range. Please consult us in advance if you plan to use this device with high-viscosity liquids. *3 Specification of accuracy, linearity and repeatability is guaranteed against calibrated liquid based on SEMI E561296. *4 It is the specification which is adjusted by Auto-PID function with our piezo control valve. *5 In order to ensure precise measurement, please maintain incoming liquid temperature to be within 10 deg.C lower or 3 deg.C higher than the ambient temperature. *6 Specification of Operating Pressure is the pressure range when liquid viscosity is 0.001Pa·s. *7 Specification of pressure drop is when liquid (with viscosity of 0.001Pa·s) is introduced at 100% F.S. of measurement point. LF-F Series Web Ver.001 Subject to change wit

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LF-F series

LF-F series

Catalog excerpts

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