Overview

This document provides detailed technical specifications for a series of gas flow control models, primarily the D512MG, D522MG, D514MG, D517MG, D524MG, and D527MG. These models are designed for precise gas flow regulation with digital and analog control interfaces, suitable for various industrial applications.

1. General Specifications

• Gas Type: Various gases compatible with the models.
• Full Scale Flow Range: Ranges from 0.2% to 100% Full Scale (F.S.) depending on model and control type.
• Operating Inlet Pressure: Configurable, typically between 13.3 kPa(A) and 750 kPa(A) depending on model.
• Operating Differential Pressure: Varies by model, generally from 110 kPa(D) to 350 kPa(D) or higher.
• Operating Downstream Pressure: Minimum values specified per model, e.g., ≥110 kPa(D) or ≥350 kPa(D).
• Control Range: Digital control typically from 0.2% or 0.5% to 100% F.S.; analog control from 2% to 100% F.S.

2. Accuracy and Stability

• Flow Rate Accuracy at 25°C: Ranges from ±1% Set Point (S.P.) to ±0.05% F.S. depending on flow range and model.
• Temperature Error from 25°C: Typically ±0.05% S.P./°C for higher flow ranges and ±0.0025% to ±0.01% F.S./°C for lower flow ranges.
• Offset/Span Stability: Annual stability ranges from ±0.5% F.S. to ±5% F.S. depending on model.
• Repeatability: Generally ±0.3% S.P. or better, with some models achieving ±0.015% F.S. at low flow ranges.

3. Valve and Mechanical Characteristics

• Valve Type: Normally closed with piezo actuator.
• Settling Time for Step Up: Typically ≤ 0.8 seconds, compliant with SEMI E17-1011 standards for calibration gas (N2).
• Valve Sheet Leak: Less than 0.2% to 0.5% F.S. depending on model.
• Proof Pressure: Up to 1000 kPa(A).
• Leak Integrity: Helium leak rate ≤ 5×10⁻¹² Pa·m³/s.
• Wetted Materials: SUS-316L stainless steel and Ni-Alloy.

4. Physical and Environmental Conditions

• Standard Fittings: 1/4 inch VCR equivalent and 1.125 inch Integrated Gas System (IGS).
• Operating Temperature: 15 to 45 °C.
• Storage Temperature: 0 to 80 °C.
• Installation Orientation: Attitude insensitive.

5. Measurement and Control Accuracy

• Inlet Pressure Accuracy: ±10 kPa for digital signals (0-1000 kPa(A)), ±17 kPa for analog signals (0-700 kPa(A)).
• Temperature Accuracy: ±1 °C within operating temperature range.
• Warming Up Operation: Minimum 30 minutes before operation.

6. Control Interface and Power Supply

• Control Interface: Analog via D-Subminiature 9-pin connector; Digital via RS-485 F-Net Protocol or DeviceNet™ and EtherCAT® communication protocols depending on model.
• Power Supply: ±15 V DC with specified current limits for analog/digital models; 24 V DC with power consumption around 5.7 to 6.2 VA for DeviceNet™ and EtherCAT® models.

7. Model Variants and Communication Protocols

• D512MG and D522MG: Basic digital/analog models with configurable pressure ranges and flow control.
• D514MG and D517MG: Models supporting DeviceNet™ and EtherCAT® communication protocols respectively, with similar performance specifications.
• D524MG and D527MG: Advanced models with DeviceNet™ and EtherCAT® protocols, offering configurable pressure ranges and improved stability.

8. Notes and Standards Compliance

• Settling time measurements are based on calibration gas nitrogen (N2) and comply with SEMI standard E17-1011.
• IGS refers to Integrated Gas System fittings.
• DeviceNet™ and EtherCAT® are communication protocol options for digital control models.

Summary

The document comprehensively details the specifications of multiple gas flow control models, emphasizing accuracy, stability, valve performance, and communication interfaces. These models are suitable for precise gas flow regulation in industrial environments, with configurable pressure ranges and robust mechanical and electronic design to ensure reliability and compliance with industry standards.