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CRITERION D500 Product specifications
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CRITERION D500 Product specifications
1 /1Page
Catalog excerpts
*1 This is settling time of flow rate output for calibration gas: N2. This is in accordance with E17-1011 of the SEMI standards. *2 IGS: Integrated Gas System *3 DeviceNet™ communication model *4 EtherCAT® communication model *1 Flow rate accuracy and repeatability of MR/MG numbers of 14 and 15 guarantee the calibration gas: N2. *2 This is settlin
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