New Concept Mass Flow Module HORIBA STEC has developed a new series of flow control modules called the CRITERION™ that satisfies extremely stringent performance requirements for gas flow control in next-generation semiconductor fabrication processes. The CRITERION™ achieves high sensitivity flow measurements over a wide dynamic range of flows by measuring the differential pressure across a refined laminar flow element. The CRITERION™ utilizes a reliable piezoelectric metal diaphragm control valve. This valve has been proven over the last 20 years as the standard on actuator HORIBA STEC’ s line...

Origin of the Product Name The name "CRITERION" is based on the Creek word "Kriterion," meaning a reference, standard, or yardstick on which to base a judgment. Aiming to become the world's leading company in the fluid control field, HORIBA STEC created a new series of flow control modules and called it CRITERION. Engineers mainly from Japan and the US have brought new life to next-generation flow control modules.

Display • Pressure • Temperature • Flow Rate • Downstream press. Connector for Digital/ Analog communication Connector for Digital communication Piezoelectric Valve Pressure sensor Flow restorictor Temperature sensor [Structure] Starting from the gas inlet, the device consists of an external particle protection filter, an inlet line pressure sensor, a control valve, a pair of pressure sensors, a flow resistor (flow restrictor), and a digital electric circuit. Not only does the gas channel contain no heat source, it is made entirely from metallic materials and has a polished interior surface as...

[High Accuracy] Flow rate accuracy improvements achieved by new measurement method CRITERION™ achieves improved accuracy and better device to device metrology labs (Japan and USA) with refined process gas measurement repeatability in flow measurements, compared to older technology MFCs, by capabilities. These lab’s measure more than 50,000 data points per process determining mass flow based on pressure measurements rather than the gas on multiple restrictors for each process gas to correlate the relationship temperature measurements methods historically utilized by previous MFCs. between pressures,...

[Fast Response] [Dynamic Range] Fast response is achieved across the entire flow range of CRITERION™ An opportunity to reduce the size of the gas panel In cutting-edge film formation, fast transient response along with precise The historic flow control range of the MFC has been 2% to 100%. flow accuracy is important. CRITERION™ modules combine an advanced However, the increase diversification in the film forming processes has variable PID algorithm (patent pending) with high accuracy, high speed been accompanied by a demand for a widening of the range of gas flows pressure transducers, a fast...

[G-LIFE Self-Diagnosis Function] (Pressure Insensitive) (Gas Law check of Integrated Flow restrictor Equation) New module to simplify gas lines Offers more intelligent gas panels Some semiconductor tools, cluster tools, have multiple chambers each with With conventional MFCs, it is difficult to recognize changes in the gas flow their own gas panel. Typically a single gas supply feeds these multiple panels. rate resulting from the aging of the flow rate sensor. Criterion modules have As a result the same gas line feeds multiple MFC concurrently opening the a self diagnostic function named “G-LIFE”...

Product specifications Digital/Analog communication model D212W Full-scale flow rate(N2 conversion flow rate) Operating supply pressure (range) 500 SCCM to 5 SLM 250 kPa(g) to 350 kPa(g) Flow rate control range Valve type Linearity Repeatability Outlet pressure Piezo, Normally closed: C Piezo, Normally closed: C Piezo, Normally closed: C Response time Pressure resistance SUS-316L electrical polish (EP standard) nickel alloy electrical polish (EP standard) nickel alloy electrical polish (EP standard) nickel alloy Leak Integrity Wetted materials Operating temperture Flow rate setting signal Flow...

Operating supply pressure (range) Outlet pressure Full-scale flow rate(N2 conversion flow rate) Piezo, Normally closed: C Piezo, Normally closed: C Piezo, Normally closed: C Flow rate control range Valve type Linearity Response time Pressure resistance electrical polish (EP standard) nickel alloy electrical polish (EP standard) nickel alloy electrical polish (EP standard) nickel alloy Leak Integrity Wetted materials Operating temperture 1.125 inch surface mount type 1.125 inch surface mount type 1.125 inch surface mount type Flow rate setting signal Flow rate output signal Power supply Standard...

Multi Display Functions Digital/ Analog communication models B DeviceNet™ communication models Flow Symbol DeviceNet™ Connector DeviceNet™ communication and shield type micro connector Analog Connector Analog communication and power supply Baud rate setting switch Digital/Analog communication model: set from 0x0.1 to 0x99 DeviceNet™ communication model: set from 00 to 63 ZERO adjust switch Awitch for ZERO adjust supply pressure (Psia) Display mode switch Awitch for display selecting flow rate setting • psia: supply pressure • kPa: supply pressure • %SET: set point • %Flow: flow rate setting outlet...

*DeviceNet™ communication model does not have plug-in phone jack Connection examples Digital communication RS485 Digital communication connector Power Supply Signal name Signal ground [D. COM] Signal ground [D. COM] N.C. Serial output/input (-) Serial output/input (+) N.C. N.C. N.C. SC-EBR cable Daisy chain connection Analog communication Using an external power source and control signal Using PE-S7 control unit SC-EAH series signal cable Analog connector Flow rate output Flow rate setting: 0 to 5 VDC Flow rate alarm (minimum/ maximum) Flow rate output signal: o to 5 VDC Valve voltage monitor...