STEC Fluid Control Digital Auto Pressure Regulator Digital/Analog Communication Model DeviceNet™ Communication Model ♦ Eliminates the effects of cross talk caused by swithing of high flow lines • For advanced fluid vaporization systems • Gas panel with a simple design made possible • Equipped with newly developed high-flow control valves ♦ Complies with RoHS regulations RoHS compliant product RoHS regulations: RoHS stands for "Restriction of Hazardous Substances" and is a set of regulations enforced in the EU to limit the use of six hazardous substances: lead, mercury, cadmium, hexavalent chromium, polybrominated biphenyls (PBBs) and polybrominated diphenyls (PBDEs), in electric and electronic components. © For the development of intelligent systems When gas is split by a large unit such as an MOCVD or LCD sputter CVD, and controlled by a mass flow controller, sudden changes in the flow rate can have an impact on other lines. The UR series, however, quickly and accurately adjusts the pressure even in these circumstances, enabling stable control and ensuring that the various mass flow controllers do not affect each other. © For the development of fluid vaporization systems Controlling internal tank pressure of bubbling system for MOCVD (or High-k CVD) and other precursors. (Mainly atmospheric condition)

RoHS compliant HEAD OFFICE 11-5, Hokodate-cho, Kamltoba, Mlnaml-ku, Kyoto, 601-8116 HORIBA STEC Co., Ltd TAIWAN Branch 3R, No.18, Lane 676, Jhonghua Rd., Jhubel City, Hsinchu County 302, Taiwan (R.O.C.) Tainan Office 1F., No.117, Chenggong Rd., Shanhua Township, Tainan County 741, Taiwan (R.O.C.) • The contents of this catalog are subject to change without prior notice, and without any subsequent liability to this company. • It is strictly forbidden to copy the content of this catalog in part or in full. • DeviceNet is a registered trademark of Open DeviceNet Vender Association. /?\ Please read...