Analog Pressure Regulator Valve state when there is no electric current (Normal valve state) Pressure control range Gauge pressure type: 20 to 950 kPa (G) 10 to 500 kPa (G) Absolute pressure type: 10 to 300 kPa (A) Gauge pressure type: 20 to 950 kPa (G) 10 to 500 kPa (G)*2 Absolute pressure type: 10 to 300 kPa (A) Pressure adjustment valve flow rate N2 equivalent F.S. flow rate value Pressure conditions: One-dimensional pressure 50 kPa (G); two-dimensional pressure atmospheric pressure [1013 hPa (A)] Under the pressure conditions listed above, 1 LM <0.0032>/5LM <0.016> * < > = Cv values Gauge pressure type: 20 to 950 kPa (G) 10 to 500 kPa (G) Absolute pressure type: 10 to 300 kPa (A) Gauge pressure type: 10 to 500 kPa (G) Absolute pressure type: 10 to 300 kPa (A) Pressure conditions: One-dimensional pressure 50 kPa (G); two-dimensional pressure atmospheric pressure [1013 hPa (A)] Under the pressure conditions listed above, 10 LM <0.0032> * < > = Cv values Accuracy ± 1% F.S. Max. one-dimensional pressure Gauge pressure type: 1 MPa (G) Absolute pressure type: 400 kPa (A) Gauge pressure type: 1 MPa (G)*3 Absolute pressure type: 400 kPa (A) Gauge pressure type: With 950 kPa (G), 1.5 MPa (G); with 500 kPa (G), 1 MPa (G) Absolute pressure type: With 300 kPa (A), 450 kPa (G) Differential pressure Gauge pressure type: With 500 kPa (G), 1 MPa (G) Absolute pressure type: With 300 kPa (A), 450 kPa (G) Metal type: ≤ 5 x 10-12 Pa·m3/s (He); rubber type: ≤ 1 x 10-8 Pa·m3/s (He) Leak Integrity 5 to 50°C (accuracy guaranteed between 15 to 35°C) Operating temperature Standard Fitting Gauge pressure type: 550 kPa (G) Absolute pressure type: 400 kPa (A) Gauge pressure type: 50 kPa (d); absolute pressure type: 100 kPa (d) Minimum differential pressure Materials at gas contact area Gauge pressure type: 1 MPa (G) Absolute pressure type: 400 kPa (A) Pressure setting signal 0 to 5 VDC (input impedance 1 MÙ or higher) Pressure output signal 0 to 5 VDC (minimum load resistance 2 kÙ) Drive power source +15 VDC ± 0.5V, 50 mA; -15 VDC ± 0.5V, 50 mA (maximum instantaneous power 120 mA) Mounting orientation *1 (-B): Provides one-dimensional pressure adjustment (back pressure type). *2 For the (-B) type, only 10 to 500 kPa is supported. *3 For the (-B) type, up to 550 kPa (G). * Pressure values written within square brackets [ ] are for reference only. NOTE: MO: Metal seal, normally open; RO: Rubber seal, normally open; B: Supports one-dimensional pressure adjustment (back pressure type). * Internal surface polishing is available for metal seal type models. (A): Absolute pressure; (G): Gauge pressure; (d): Differential pressure * LM is a symbol indicating gas flow rate (L/min at 25°C, 101.3 kPa). UR73** Series Web Ver.001 Subject to change with