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UVISEL 2 Scientific Spectroscopic Ellipsometer Platform

UVISEL 2 Scientific Spectroscopic Ellipsometer Platform
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UVISEL 2 Scientific Spectroscopic Ellipsometer Platform - 1

UVISEL 2 Scientific Ellipsometric Platform The Ultimate Solution to Every Challenge in Thin Film Measurement Refractive index Roughness Extinction coefficient

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UVISEL 2 Scientific Spectroscopic Ellipsometer Platform - 2

A Breakthrough in Thin Film Measurement Introducing UVISEL 2 Tackle the most challenging thin film applications with the next generation ellipsometer: UVISEL 2 Work Faster & Smarter UVISEL 2 is a fully integrated system that delivers fast analysis and world class results for virtually all ellipsometric analysis requirements and thin film applications. The combination of full automation and powerful software provides deeper insight into thin film structures, and more confident characterization analyses. HORIBA Scientific has developed the next generation of scientific spectroscopic...

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UVISEL 2 Scientific Spectroscopic Ellipsometer Platform - 3

S c ientific Spectroscopic Ellipsometer Platform Fully Automated Thin Film Metrology Best Vision System The UVISEL 2 is a fully automated ellipsometer benefitting both industrial and research-oriented users. Sample alignment, autofocus, spot size selection, variable angle and mapping functions all benefit from computer control. The UVISEL 2 includes an innovative, color imaging vision system with polarization information. This patented imaging system enables clear visualization of the measurement beam spot on all types of film materials including rough, smooth, transparent and reflective...

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UVISEL 2 Scientific Spectroscopic Ellipsometer Platform - 4

Handle Many New and Exciting Powerful DeltaPsi2 software from research to routine System control, data measurement, simulation, modelling, reporting and automation are seamlessly integrated by the powerful DeltaPsi2 software platform. The DeltaPsi2’s intuitive operation meets the requirements of both experienced SE scientists and newcomers to the technique. From the laboratory to industry, the UVISEL 2 ellipsometer platform delivers the results required to characterize thin film samples accurately, and optimizes routine process efficiency. T h in Film Applications Ultra Thick Film DeltaPsi2...

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UVISEL 2 Scientific Spectroscopic Ellipsometer Platform - 5

Standard Configuration Light source 150 W Xenon Spot size Automated achromatic microspots, 8 sizes down to 35 µm (at normal incidence) Spectral range 190 - 1000 nm NIR extension up to 2100 nm Monochromator Double monochromator For FUV-VIS range: Twin PMT detectors For NIR extension: InGaAs detector Sample stage 200 mm x 200 mm, automatic XYZ adjustment, vacuum chucks, Z height 35 mm, automated autofocus and tilt alignment Sample viewing Vision system using CCD camera Field of view: 6.5 x 3.5 mm at 70° Goniometer Automatic variable angle from 35° to 90° Options Accessories Temperature...

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