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UVISEL 2 Scientific Spectroscopic Ellipsometer Platform

UVISEL 2 Scientific Spectroscopic Ellipsometer Platform

UVISEL 2 Scientific Spectroscopic Ellipsometer Platform

Product catalog summary
Introduction
The UVISEL 2 is a state-of-the-art scientific spectroscopic ellipsometer designed for advanced thin film measurement. It offers a comprehensive solution for characterizing a wide range of materials, including dielectrics, semiconductors, polymers, metals, metamaterials, and nanostructures.

Key Features
  • Wide Spectral Range: Covers from Far Ultraviolet (FUV) to Near Infrared (NIR), allowing for versatile material characterization.
  • Automated Spot Size Selection: Offers 8 selectable spot sizes for precise measurement placement.
  • Advanced Vision System: Patented color imaging system with polarization information for accurate spot positioning.
  • Phase Modulation Technology: Provides high accuracy and resolution without mechanical movement, ensuring reliable measurements.
  • DeltaPsi2 Software: Integrates system control, data measurement, simulation, modeling, and reporting for seamless operation.

Performance and Automation
  • Fully Automated System: Includes features like automatic XYZ mapping, tilt adjustment, autofocus, and variable angle of incidence.
  • High Performance Spectroscopic Features: Achromatic optical design with fast scanning and high-resolution monochromators.
  • Measurement Capabilities: Supports ellipsometric, kinetic, intensity, Mueller matrix, and scatterometry measurements.

Applications
  • Suitable for photovoltaic, semiconductor, flat panel display, optical coatings, surface chemistry, biotechnology, and optoelectronic applications.
  • Capable of handling ultra-thick films, low index contrast layers, and flexible films with anisotropy.

Specifications
  • Light Source: 150 W Xenon
  • Spectral Range: 190 - 1000 nm, extendable to 2100 nm
  • Sample Stage: Automatic XYZ adjustment with vacuum chucks
  • Operating Systems: Compatible with Windows XP/7

Conclusion
The UVISEL 2 ellipsometer is designed for minimal maintenance and long-term stable measurements, making it an ideal choice for both research and industrial applications. Its advanced features and automation capabilities ensure high-quality thin film characterization.
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Catalog excerpts

UVISEL 2 Scientific Spectroscopic Ellipsometer Platform-1

UVISEL 2 Scientific Ellipsometric Platform The Ultimate Solution to Every Challenge in Thin Film Measurement Refractive index Roughness Extinction coefficient

 Open the catalog to page 1
UVISEL 2 Scientific Spectroscopic Ellipsometer Platform-2

A Breakthrough in Thin Film Measurement Introducing UVISEL 2 Tackle the most challenging thin film applications with the next generation ellipsometer: UVISEL 2 Work Faster & Smarter UVISEL 2 is a fully integrated system that delivers fast analysis and world class results for virtually all ellipsometric analysis requirements and thin film applications. The combination of full automation and powerful software provides deeper insight into thin film structures, and more confident characterization analyses. HORIBA Scientific has developed the next generation of scientific spectroscopic ellipsometer...

 Open the catalog to page 2
UVISEL 2 Scientific Spectroscopic Ellipsometer Platform-3

S c ientific Spectroscopic Ellipsometer Platform Fully Automated Thin Film Metrology Best Vision System The UVISEL 2 is a fully automated ellipsometer benefitting both industrial and research-oriented users. Sample alignment, autofocus, spot size selection, variable angle and mapping functions all benefit from computer control. The UVISEL 2 includes an innovative, color imaging vision system with polarization information. This patented imaging system enables clear visualization of the measurement beam spot on all types of film materials including rough, smooth, transparent and reflective surfaces....

 Open the catalog to page 3
UVISEL 2 Scientific Spectroscopic Ellipsometer Platform-4

Handle Many New and Exciting Powerful DeltaPsi2 software from research to routine System control, data measurement, simulation, modelling, reporting and automation are seamlessly integrated by the powerful DeltaPsi2 software platform. The DeltaPsi2’s intuitive operation meets the requirements of both experienced SE scientists and newcomers to the technique. From the laboratory to industry, the UVISEL 2 ellipsometer platform delivers the results required to characterize thin film samples accurately, and optimizes routine process efficiency. T h in Film Applications Ultra Thick Film DeltaPsi2 includes...

 Open the catalog to page 4
UVISEL 2 Scientific Spectroscopic Ellipsometer Platform-5

Standard Configuration Light source 150 W Xenon Spot size Automated achromatic microspots, 8 sizes down to 35 µm (at normal incidence) Spectral range 190 - 1000 nm NIR extension up to 2100 nm Monochromator Double monochromator For FUV-VIS range: Twin PMT detectors For NIR extension: InGaAs detector Sample stage 200 mm x 200 mm, automatic XYZ adjustment, vacuum chucks, Z height 35 mm, automated autofocus and tilt alignment Sample viewing Vision system using CCD camera Field of view: 6.5 x 3.5 mm at 70° Goniometer Automatic variable angle from 35° to 90° Options Accessories Temperature controlled...

 Open the catalog to page 5

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.