Auto Soft The fully automatic mode provides a very intuitive software based on the use of icons. Four main interfaces are available to build experimental recipes, manage data, control the system in realtime, and for maintenance. Standard Configuration Fully Automatic Mode for Routine Analysis 1> Load Sample • Automatic adjustment of the sample Worldwide Customer Support Founded nearly 190 years ago, HORIBA Jobin Yvon is one of world’s largest manufacturers of analytical and spectroscopic systems and components. Certified ISO 9001 and 14001, our instruments are manufactured under a strict quality assurance program. They are supported by a worldwide network of strategically located facilities in the United States, Europe and Asia that are ready to provide assistance when and where it is needed. Our staff of highly trained service and application specialists install and certify instrument performance, and conduct technical and application user training for smooth and efficient commissioning of the instruments. This commitment to product excellence and continued support is part of the HORIBA Jobin Yvon culture. • elect your experimental recipe S in the ready to use application database • isualization of the spot on the sample V with the MyAutoView vision system • Choose your measurement site DeltaPsi2 Scientific Mode to Extend the Measurement Capability DeltaPsi2 is a fully integrated spectroscopic ellipsometry platform that includes advanced measurement and analysis capabilities and a complete materials database. This software is ideal for engineering applications for new sample characterization or optimization of an existing experimental recipe. Once the new recipe is validated it can be performed repeatedly without expert intervention. • easure at a single position or M multiple positions to map thin film uniformity • lear table provides thickness, C optical constants, film uniformity and other material properties of the sample • hin film result status: T in or out tolerance limits • Automatic reporting Options Accessories Microspot Table •S ample cells: Temperature controlled cell, Electrochemical cell, Liquid cell • ample stage: Autosampler, 360° Rotation S control, Transmission mount, Plastic film mounts, Lens and curved sample mounts Xenon lamp needed for spot sizes < 100 x 100 µm Dimension (wxdxh): 1400-1840 x 530 x 740 mm Performance Measurement time Accuracy Repeatability Light source Combination halogen and blue LED Spectral range 440 – 1000 nm Spot size 500 µm x 500 µm; 250 µm x 500 µm; 250 µm x 250 µm; 70 µm x 250 µm; 100 µm x 100 µm; 50 µm x 60 µm; 25 µm x 60 µm Detector CCD – Resolution: 2 nm Sample stage 200 mm x 200 mm, automatic XYZ adjustment, vacuum chuck, Z height 40 mm Sample viewing CCD camera – Field of view: 1.33*1 mm Resolution: 10 µm Goniometer Fixed at 70° - Possible set up at 66° or 61.5° < 1 s, typical 5 s N IST 1000 Å SiO2 /Si: d ± 4 Å - n(632.8 nm) ± 0.002 Fused silica: n ± 0.004 ± 0.2 Å – Tested on NIST 150 Å SiO2 /Si Facility Requirements 2008 IC Industry New System Award 2008 ACCSI Best New Instrument of the Year Find us at www.horiba.com/scientific or contact us: France : USA : Japan : Germany : China : Operating systems Windows® 2000 / XP / Vista / 7 Power supply 100 V / 115 V / 230 V; 200 W; 50 / 60 Hz Weight 80 kg Certificate CE • Reprocessing capability Technology: Spectroscopic Ellipsometer, liquid crystal modulation based This document is not contractually binding under any circumstances - Printed in France - ©HORIBA Jobin Yvon - RCS EVRY B 837 150 366 - July 2010. "User Oriented Software Platform" The simple solution to measure thin films Film thickness, Optical constants, and Imaging

Broad Range Auto SE “Designed for your thin film measurements, to deliver maximum efficiency with simplicity” “Optimized for enhanced functionality and flexibility” MyAutoView Vision System The Auto SE is a new thin film measurement tool that provides fully automated analysis of thin film samples with simple, push button operations. Sample analysis takes only a few seconds and a complete report is generated automatically. The report provides a comprehensive description of the thin film stack over the wavelength range 440-1000 nm, and includes film thicknesses, optical constants, surface roughness,...