Overview

This document details the specifications, features, and global support infrastructure of HORIBA STEC's high-performance Mass Flow Controllers (MFCs), focusing on the SEC-Z500X series. These MFCs are essential for precise gas flow control in semiconductor manufacturing, directly influencing device quality.

Key Features and Specifications

• RoHS Compliance: Ensures environmental safety and corporate responsibility.
• Global Supply Chain: Three main hubs in Kyoto (HQ), Aso (mass production), and USA (agile supply) guarantee stable worldwide availability and service quality.
• Accuracy and Calibration: Achieves ±1.0% set point accuracy (25–100% full scale) and ±0.25% full scale accuracy (≤25% full scale), with calibration traceable to NIST standards.
• Advanced Flow Control: Uses polynomial approximation for sensor output correction, enabling high precision across full flow ranges and multiple gases.
• Fast Response: Variable PID algorithm enables response times within 1 second, outperforming traditional single PID controllers.
• Multi-Gas and Multi-Range: Gas types and flow ranges can be changed via configuration software without physical removal, reducing downtime and inventory costs.
• Wide Flow Range: From 5 SCCM to 50,000 SCCM depending on model and gas type, with detailed MR/MG numbering for calibration.
• Materials and Construction: Wetted parts made of SUS-316L stainless steel with internal polishing, suitable for toxic/reactive gases; valves use piezo or solenoid actuators with normally closed/open options.
• Communication Interfaces: Supports analog (0–5 VDC), RS-485 with F-Net protocol, and DeviceNet™ for networked control.
• Operating Conditions: Temperature range 5–50°C, pressure up to 1000 kPa(g), leak rate below 5×10⁻¹² Pa·m³/s (He).

Calibration and Traceability

Calibration is conducted using high-precision flow standards in Japan and the USA, ensuring accuracy for various gases. Data is centrally managed to maintain quality and NIST traceability.

Configuration Software

Dedicated software allows easy modification of gas types and flow ranges, including MR/MG number selection and N2 gas conversion for inspection. Training seminars are provided for effective use.

Product Line and Models

Multiple models are available with varying flow ranges, valve types, communication protocols, and fittings. Examples include SEC-Z514MGX, SEC-Z522MGX, SEC-Z532KVX, and DeviceNet™ models like SEC-Z534MGX. Dimensional and connector details support integration.

Installation and Connectivity

• Standard fittings: 1/4, 3/8, 1/2 inch VCR or Swagelok; panel mount options available.
• Communication connectors: D-Sub 9-pin (analog), RJ-45 (digital).
• Supports RS-485 daisy-chain networking.

Global Support Network

HORIBA STEC operates offices and service centers across Japan, USA, Korea, Taiwan, UK, France, Netherlands, Germany, Singapore, and China, ensuring prompt technical support and reliable supply worldwide.

Critical Parameters and Limitations

• Accuracy varies with flow range and gas type; performance meets SEMI E56-1296 standards.
• Operating temperature and pressure limits must be respected for safety and performance.
• Configuration changes require proprietary software and training.

Best Practices and Recommendations

• Use configuration software to flexibly adjust specifications, minimizing inventory and downtime.
• Maintain calibration traceability through regular verification against NIST standards.
• Utilize global support for installation, troubleshooting, and training.
• Adhere to specified operating conditions to ensure accuracy and device longevity.

Company Contact Information

The document provides detailed contact information for HORIBA STEC’s offices and service centers, primarily in Asia, including China, Japan, and Korea, as well as other global locations.

China Offices and Service Centers

• Shanghai Office: 701, United Plaza, 1468 Nanjing Rd. West, Shanghai 200040. Phone: (86)21-3222-1818.
• Beijing Office: Room 1801, Capital Tower Beijing, Tower 1 No. 6 Jia, Jianguomenwai Ave., Beijing 100022. Phone: (86)10-8567-9966.
• Shenzhen Office: 701 Room, A6th Building, FuTong TianJun Garden, Shenzhen City, Guangdong Province 518000. Phone: (86)755-2967-1203.
• Shanghai Service Center: Room 303, No. 84, Lane 887, Zu-chong-zhi Rd., Zhangjiang Hi-tech Park, Shanghai 201203. Phone: (86)21-5131-7150.

Japan Offices and Facilities

• Head Office: 11-5, Hokodate-cho, Kamitoba, Minami-ku, Kyoto, 601-8116. Phone: (81)75-693-2300.
• Aso Factory: Torikokogyodanchi, 385-11, Kohmaibata, Nishihara-mura, Kumamoto, 861-2401. Phone: (81)96-279-2921.
• Sendai Sales Office: 9F Izumi-chuuoh Building, Izumi-ku, Sendai-shi, Miyagi, 981-3133. Phone: (81)22-772-6717.
• Tokyo Sales Office: Kanda-Awaji-cho Nichome Building, Chiyoda-ku, Tokyo. Phone: (81)3-6206-4731.
• Nirasaki Sales Office: 70, Wakao, Ohkusa-machi, Nirasaki-city, Yamanashi, 407-0037. Phone: (81)551-23-5339.
• Nagoya Sales Office: Sumitomo Seimei Chikusa 2nd Building 6F, Nagoya-shi, Aichi, 461-0004. Phone: (81)52-936-9511.
• Kyushu Sales Office: Same address as Aso Factory. Phone: (81)96-279-2922.

Korea Office

Located in Seongnam-si, Gyeonggi-do, South Korea. Phone: 031-777-2277. Emphasizes consulting the handling manual for safe use.

Additional Locations

Presence in Singapore, Taiwan, UK, Netherlands, Germany, France, and USA, supporting global operations.

Product Mention

Reference to "High Performance Mass Flow Controller" model S5-AK53N, indicating related product offerings.

Summary

The document serves as a comprehensive technical and contact reference for HORIBA STEC’s mass flow controllers, highlighting product capabilities, calibration standards, configuration flexibility, and a robust global support network. It underscores the company’s commitment to quality, precision, and customer service in semiconductor manufacturing applications.