GA-360E Series

GA-360E Series

GA-360E Series

Product catalog summary
Overview: The GA-360E Series is a high-sensitivity trace gas monitor designed by HORIBA for measuring impurities in bulk gases such as N2, He, O2, Air, and Ar, commonly used in semiconductor manufacturing and clean rooms. It utilizes a non-dispersive infrared (NDIR) absorption method with a unique cross-flow modulation technique.
Key Features:
  • Simultaneous and continuous measurement of two components among CO, CO2, and CH4.
  • Compact design suitable for standard 19-inch racks.
  • Eliminates routine calibration cycles, providing long-term stable measurements.
  • Available in one or two-component versions, customizable based on customer requirements.
Technical Specifications:
  • Measurement Range: 0 - 1/2/5/10 ppm.
  • Minimum Detection Sensitivity: 0.01 ppm (1 sigma).
  • Repeatability and Linearity: ±2% Full Scale (F.S.).
  • Zero Drift: ±0.02 ppm/day, ±0.03 ppm/7 days.
  • Span Drift: ±2% F.S./day, ±3% F.S./7 days.
  • Response Time: Within 180 seconds.
  • Sample and Reference Gas Flow Rate: Approximately 3.5 L/min.
  • Output Options: 0 - 1 V, 10V, 4 - 20 mA.
  • Power Supply: AC 100 V to 240 V (specified by customer).
Operational Principle: The GA-360E uses an infrared beam that passes through a cell to a detector. Solenoid valves alternate the flow of sample and reference gases, causing a metallic membrane in the detector to move, enhancing sensitivity and eliminating zero drift. Zero and span calibrations are performed using standard gases.
Applications: Suitable for monitoring CO, CO2, and CH4 in high-purity gases used in semiconductor manufacturing, clean rooms, and medical facilities.
Additional Information: The reference gas must be supplied by the customer. The device includes alarms for flow, chopper, and power down conditions.
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Catalog excerpts

GA-360E Series-1

Process & Environmental The two-in-one high-sensitivity analyzer • NDIR absorption method with unique cross- flow modulation technique. • Designed to measure impurities in bulk gas (N2) used in semiconductor and other high-purity gases such as He, O2, Air and Ar, used in clean rooms, medical facilities and manufacturing processes. • Simultaneous and continuous measurement • Compact and lightweight, fits in a standard HORIBA is a worldwide leader in non-dispersive infrared (NDIR) technology and a major NDIR analyzer manufac- turer. The heart of the GA-360E Trace Gas Monitor is the multinational^ accepted, field-proven, cross-flow modu- lated HORIBA NDIR analyzer. Highly reliable trace gas monitors The GA-360E represents a concept in trace gas monitors, is designed to eliminate routine calibration cycles and to provide long-term stable measurement and continuous unattended operation. It furnishes reliable concentration. Every element of the monitor has been selected to offer the ultimate in reliability and accuracy. Solid-state modular electronics ensure optimum performance and minimum Available in one-or two-component versions The GA-360E is available in a one-component version to measure a single component, or a two-component versions specified by the customer. Simultaneous measurement of two different components is made possible by linking two detectors to the main unit via a single sample line.

 Open the catalog to page 1
GA-360E Series-2

light source reference gast BPA-PSD: Brand Pass Amplifier Phase Sensitive Detection An infrared beam in the analyzer unit passes through the cell to the detector. During measurement, the solenoid valves alternately tensity of the light reaching the detector when the cell is filled with sample gas from when it is filled with reference gas. This defference causes a metalic membrane in the detector to move back and forth in accordance with the alternating gas flow (cross-flow modulation). The analyzer requires neither an optical chopper nor optical adjustment. Furthermore, this technique virtually...

 Open the catalog to page 2

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