VP (FE) SEM Family

VP (FE) SEM Family

VP (FE) SEM Family

Product catalog summary
Overview: The VP-SEM Product Family, including models SU3800, SU3800SE, SU3900, and SU3900SE, is designed for high productivity and automation in scanning electron microscopy (SEM). These models feature advanced automation to minimize manual effort and ensure reproducible results.

Specifications: The product family offers two types of electron optics: tungsten and Schottky field emission. The SU3800 and SU3900 models share common software, electronics, and detector platforms. They are equipped with robust tungsten hairpin cathodes and offer high-resolution imaging capabilities.

Sample Chambers and Stages: The SU3800/SU3800SE features a large analytical sample chamber with a eucentric sample stage, accommodating samples up to 200mm in diameter and 80mm in height. The SU3900/SU3900SE is ideal for industrial applications, supporting samples up to 300mm in diameter and 130mm in height, with a maximum weight of 5kg.

Automation and Accessories: The models support flexible automation of routine tasks via the EM Flow Creator and offer various analysis accessories such as EDX, EBSD, and more. Optional accessories include sample airlocks and Hitachi Map 3D packages for enhanced functionality.

Detectors and Imaging: The SEMs are equipped with highly efficient detectors, including a secondary electron detector for high vacuum and a 5-segment semiconductor backscattered electron detector for both high and low vacuum. An optional multifunction detector "UVD" is available for additional imaging capabilities.

Performance: The SEMs offer resolutions of 3.0nm at 30kV and 15nm at 1kV for the SU3800/SU3900, with enhanced resolutions for the SE models. They support stable sample currents up to 150nA and feature a variable chamber pressure range.

Additional Features: The instruments are designed for easy handling of non-conductive samples with a low-vacuum operating mode. They also include intelligent filament technology for optimized cathode heating and long life.

Contact Information: For further assistance, Hitachi High-Tech Europe GmbH provides guidance and support. Contact details are provided for inquiries.
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Catalog excerpts

VP (FE) SEM Family-1

Configure your ideal SEM

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VP (FE) SEM Family-2

VP-SEM Product Family Air Protection Thermal Tungsten Emitters Modular VP-SEM platform | 2 sample chambers | 2 types of electron optics SU3800 Samples up to 229mm diameter can be fully inspected (SU3900) Multiple sample holder for 33 x 15mm Ø stubs GUI with integrated EDX operation Product Features The SU3800/3900 VP-SEM family focusses on productivity. These tools automate repetitive tasks, so you can achieve reproducible results in a short time with little manual effort. Two different sample chambers with either tungsten or Schottky field emission optics are available. Both SU3800 and SU3900...

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VP (FE) SEM Family-3

VP-SEM Product Family Configure your ideal SEM Thermal Tungsten Emitters Schottky Emitter Two Specimen Chambers / Eucentric Stages: Up to 200mm Ø, 80mm (H), 2kg sample weight on 5 axes Up to 300mm Ø, 130mm (H), 5kg sample weight on 5 axes Tungsten Hairpin Cathode Schottky Field Emitter The SU3800/SU3800SE is the versatile, standard version of the product family. It features a large analytical sample chamber with a eucentric sample stage, which can be fully pulled out for quick sample changes. The chamber can accommodate samples with a diameter of up to 200mm and a height of 80mm (at the analytical...

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VP (FE) SEM Family-4

Not sure which product aligns with your needs? Our experts are here to provide guidance and help you make the best choice. Speak with an expert Follow us Hitachi High-Tech Europe GmbH Europark Fichtenhain A12 47807 Krefeld Tel.: +49 2151 6435 300 E-Mail: [email protected] www.hitachi-hightech.com Notice: For correct operation, follow the instruction manual when using the instrument. Specifications in this catalog are subject to change with or without notice, as Hitachi High-Tech Corporation continues to develop the latest technologies and products for our customers. Copyright © Hitachi...

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