Hitachi High-Tech The smart little SEM that flexibly adjusts to your skills and needs

An SEM evolution Tabletop SEMs have gone through a remarkable evolution during the past decade, establishing themselves as an optimum solution for users looking for the “next level” beyond optical stereo microscopy. They inspect objects at higher magnification and resolution than classical optical microscopy can reach without being limited by an extremely shallow depth of focus. Furthermore, the backscattered electron detectors of typical tabletop SEMs offer additional information on the distribution of different materials, which can be quantified by executing proper EDX analysis. However, the...

Concept and Outline A general problem for a typical ultracompact tabletop SEM is that its small size comes at the cost of functionality: The vacuum system is fixed to a certain operation mode, and the miniaturized electron optic system does not allow the application of high-quality low-aberration lens systems. Sometimes this can be somewhat compensated by the use of special electron sources like LaB6 / CeB6 or even Field Emission sources which can improve the resolution of compromised electron optics, but such approaches typically bring more problems than benefits in terms of general usability,...

Electron Optics: The heart of the FlexSEMII At the core of the FlexSEMII is a powerful electron optics, covering an accelerating voltage range from 300V up to 20kV at which a SE image resolution of 4nm at high vacuum conditions is guaranteed. Figure 1. Toner particle, imaged at 5kV in high-vacuum mode with the Everhart-Thornley-SE detector. Magnification (polaroid base) is 20.000x. Figure 2. Gold grains on carbon substrate. Accelerating voltage 20kV, magnification Hitachi High-Tech | FLEXSEMII Figure 3. FlexSEMII’s electron gun flipped open for direct access to the filament cartridge. While 20kV...

unit for all conditions, from high to low vacuum and from low to high accelerating voltages. The Detection System of the FlexSEMII The FlexSEMII comes as standard with two dedicated vacuum operation modes: High-vacuum mode for the observation of electrically conductive specimens, and a variable-pressure mode for the analysis of non-conductive or moist specimens, allowing for chamber pressures up to 100Pa. Accordingly, the FlexSEMII is equipped as standard with suitable electron detectors. Besides an Everhart-Thornley type detector for high-resolution SE imaging in highvacuum mode, there is a...

The FlexSEMII flexibly adapts to the skill level of each operator. The system's base concept is “convenient & risk-free operation”. During sample loading, measures are taken to prevent collisions between sample and SEM lens or detectors: Cup-like sample holders with height-adjustable inner stubs make it easy to set a correct sample height. Simply put, no part of the specimen may extend beyond the upper edges of the cup-shape holder. This is even verified when closing the drawer-type chamber door - a height gauge at the chamber entrance, resembling the objective lens and the BSE detector contours...

For absolute beginners who might be unfamiliar with SEM-typical phrases such as “accelerating voltage” or “spot intensity” and a proper choice out of them for the desired application, the FlexSEMII offers a selection of “application purposes”. This are basic desires for each SEM analysis, such as “surface composition”, “surface topography”, or “EDX analysis”, and so forth. For each purpose, the FlexSEMII has a pre-defined and self-aligned optimum working condition which is known to provide the desired output to the user. That way, even unexperienced users can take good-quality images of their...

The FlexSEMII also supports special analytical applications which go beyond simple imaging. Firstly, it supports professional elemental EDX analysis technologies by renowned companies such as Oxford Instruments and Bruker. Special compact detectors with 30mm2 or 60mm2 SDD can be fully integrated into the FlexSEMII's body and allow for high count rates of several kilo-counts per second. The instrument's maximum accelerating voltage of 20kV supports K-line detection of heavier atomic weight elements and conforms to DIN/ ISO norms for asbestos analysis. Point/ area spectra, line scans and element...

More information Contact us If you need help choosing the best product for your needs or seeking expert guidance to optimise your microscopy, our experts are here to help. Contact us today to discover how Hitachi High-Tech can enhance your lab’s capabilities. Visit: www.hitachi-hightech.com Email: [email protected] This publication is the copyright of Hitachi High-Tech Europe GmbH and provides outline information only, which (unless agreed by the company in writing) may not be used, applied or reproduced for any purpose or form part of any order or contract or regarded as the representation...