BIREFRINGENCE MEASUREMENT Exicor® 150AT PRODUCT BULLETIN Hinds Instruments’ Exicor Birefringence Measurement system Model 150AT is the work horse platform of the Exicor® Applications  Quality control metrology birefringence measurement system family of products. This  Low-level birefringence measurements of system is versatile enough to excel in both production floor and R&D lab environments. This model is widely used in research and industry to measure components; such as Photomask blanks and lithography reticules, DVD blanks, plastic films, lens blanks, laser crystals, cell phone display windows, injection molded parts, and many others. The bench top design and intuitive automated scanning software make this product the best choice for day-in-day-out  Plate glass  Scientific optical components  Laser crystals  DVDs  Qualification of photolithography components including  Photomasks  Fused silica optical components  Calcium fluoride lens blanks and windows evaluation of both High Value precision optical components and Commodity optics (up to 150mm X 150mm). Significant Features  Unprecedented sensitivity in low-level birefringence measurement LEADING EDGE SENSITIVITY AND  Simultaneous measurement of birefringence magnitude and angle Using Hinds Instruments’ patented Photoelastic Modulator (PEM) technology, the system provides the highest levels  moving parts in the optical system No of birefringence sensitivity available today. In addition, the PEM provides high-speed operation, modulating at a 50 kHz rate. Leading edge sensitivity and repeatability easily provide subnanometer levels of birefringence measurement, critical to  Automatic mapping of variable-sized optical elements  Photoelastic modulator technology  Simple, user-friendly operation many applications. DESIGNED FOR SIMPLE, STRAIGHT FORWARD OPERATION An optical sample as large as 6” x 6” (larger sizes optional) can

BIREFRINGENCE MEASUREMENT Exicor® 150AT PRODUCT BULLETIN HIGH SENSITIVITY ¼ Wave Systems Retardation Range, nm EXTENDED RANGE Resolution / Repeatability Retardation 1, 2, 3, nm Fast Axis Angle Measurement Rate/Time Spot Size Up to 100 pps / Sample Dependent ~ 1 mm typical Up to 10 pps / Sample Dependent Variable, 1-3 mm Specifications presented are based on 633nm laser source unless otherwise noted. Custom wavelengths are available from DUV (>150nm) to NIR (<1550nm). Typical system wavelengths available are 157nm, 193nm, 248nm, 355nm, 405nm, 436nm, 455nm, 470nm, 505nm, 530nm, 546nm, 617nm, 625nm,...