Vacuum Valve Series
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^Q^B^P^ HIGHLIGHT TECH CORP. There is always something to do with vacuum tech in life.

VALVE SERIES Ordering Information ...?„.. ANGLE VALVE Manually Operated with Bellows tM Manually Operated without Bellows 6-5 Manually Operated Copper Seal Bonnet with Bellows 6-8 Pneumatically Actuated with Bellows Attached Reed Sensor 6:22 Z-INLINE VALVE Manually Operated wjth Bellows 6:26 Manually Operated without Bellows 6-29 Manually Operated Copper Seal Bonnet with Bellows 6:32 Pneumatically Actuated with Bellows Attached Reed Sensor 6-39 Y-INLINE VALVE Manually Operated with Bellows 6-42 Manually Operated Copper Seal Bonnet with Bellows .6-45 Pneumatically Actuated with Bellows 6-48...

General Information • HTC is pleased to offer vacuum valves designed and manufactured In Tainan, Taiwan, R.O.C. These valves are the result of a long and careful development program designed to Insure product quality, reliability and value. Every effort has been made to provide a valve family suited to the requirements of various users. They will function reliably in applications ranging from semiconductor production system with chemical and particulate • Long life operation. • Stainless steel welded bellows seal. • Manual and electropneumatic actuation or fail safe operators (closes in the...

• KF, ISO and ANSI port models are designed for high vacuum applications where vacuum pressures approximate 10 9 torr and bake-out temperature do not exceed 150°C.The standard international KF/ISO configurations and ANSI configurations are used in areas requiring an easily mountable and demountable flange type seal. • CF port models are designed for ultra-high vacuum applications where the vacuum pressure approximates 10 10 torr and bake-out temperatures do not exceed 200°C These valves are used in applications during an OFHC copper gasket rather the conventional Viton O'ring because of...

Ordering Information 1 = pneumatic (spring to close) 4 = pneumatic (spring to Open) FLANGE TYPE 1 = Stainless corrugated bellows BODY MATERIAL POSITION INDICATOR SOLENOID VOLTAGE

Table 1. Valve 3000 Series BPHVPH VITON POPPET BONNET SEAL 3001 Pmtt FFKM POPPET BONNET SEAL 3003 M| FFKM POPPET METAL BONNET SEAL 3004 VITON POPPET METAL BONNET SEAL 3006 HH IP VITON POPPET BONNET SEAL 3021 ■■SgiS FFKM POPPET BONNET SEAL 3023 Wm FFKM POPPET METAL BONNET SEAL 3024 VITON POPPET BONNET SEAL 3026 VITON POPPET BONNET SEAL 3041 FFKM POPPET BONNET SEAL 3043 FFKM POPPET METAL BONNET SEAL 3044 VITON POPPET METAL BONNET SEAL 3046 B)| Ml VITON POPPET BONNET SEAL 3061 InlB FFKM POPPET BONNET SEAL 3063 Wm FFKM POPPET METAL BONNET SEAL 3064 VITON POPPET METAL BONNET SEAL 3066 VITON...

Angle Valve VITON POPPET FFKM POPPET FFKM POPPET BONNET ALL-METAL VITON POPPET VITON POPPET FFKM POPPET FFKM POPPET BONNET ALL-METAL VITON POPPET VITON POPPET FFKM POPPET FFKM POPPET BAKEABLE ALL-METAL VITON POPPET VITON POPPET FFKM POPPET FFKM POPPET BAKEABLE ALL-METAL VITON POPPET VITON POPPET FFKM POPPET FFKM POPPET BAKEABLE ALL-METAL VITON POPPET Series code BONNET SEAL BONNET SEAL METAL BONNET SEAL METAL BONNET SEAL BONNET SEAL BONNET SEAL METAL BONNET SEAL BONNET SEAL BONNET SEAL BONNET SEAL METAL BONNET SEAL METAL BONNET SEAL BONNET SEAL BONNET SEAL METAL BONNET SEAL METAL BONNET...

HIGHLIGHT TECH CORP. Specifcations for No Port Flange Angle Valve Conductance is for molecular flow of right-angle elbow with same dimension , and based on air at 20°C Measure using helium search gas with test time less than one minute to avoid the leak signal caused by permeation through elastomer seal. Dimension in mm unless otherwise noted All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

ANGLE VALVE Manually Operated with Bellows

ANGLE VALVE Manually Operated with Bellows HIGHLIGHT TECH CORP.

ANGLE VALVE Manually Operated with Bellows Port Connections : Tube End Port Connections : KF Flange Port Connections : CF Rotatable Flange Port Connections • Note : All dimensions shown on this page are in inch. • Stainless steel body surface treatment: 1 .below 4" puff polishing • Viton Seal Bonnet: 10 9 Torr vacuum rating KF, ISO and CF flange.

HIGHLIGHT TECH CORP. Manually Operated with Bellows Available Area:Europe (Special Sizes Available Upon Request) Port Connections : KF Flange Port Connections : CF Rotatable Flange Port Connections • Stainless steel body surface treatment: 1 .below 4" puff polishing • Viton Seal Bonnet: 10 9Torr vacuum rating KF, ISO and CF flange.

ANGLE VALVE Manually Operated without Bellows

VACUUM VALVE ANGLE VALVE HIGHLIGHT TECH CORP. Manually Operated without Bellows Port Connections : Tube End Port Connections : KF Flange • Note:AII dimensions shown on this page are in inch • Stainless steel body surface treatment: 1 .below 4" puff polishing • Viton Seal Bonnet: 10 9 Torr vacuum rating KF flange.

ANGLE VALVE Manually Operated without Bellows Available Area -.Europe (Special Sizes Available Upon Request) Port Connections : KF Flange • Stainless steel body surface treatment: 1 .below 4" puff polishing • Viton Seal Bonnet: 109Torr vacuum rating KF, ISO and CF flange.

HIGHLIGHT TECH CORP. ANGLE VALVE Manually Operated Copper Seal Bonnet with Bellows Dimension in mm unless otherwise noted All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

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HIGHLIGHT TECH CORP. Manually Operated Copper Seal Bonnet with Bellows Port Connections : Tube End Port Connections : KF Flange Port Connections : CF Rotatable Flange • Note : All dimensions shown on this page are in inch. • Stainless steel body surface treatment: 1 .below 4" puff polishing • Bakeable to 150 °C. (200°C intermittently for CF flange port). • Metal Seal Bonnet: 10 9 Torr vacuum rating KF, and approximate 1010Torr vacuum rating CF flange