Vacuum PUMP
12Pages

^Q^B^P^ HIGHLIGHT TECH CORP. There is always something to do with vacuum tech in life.

General Information Turbo Molecular Pump 10-2 Dry Pump Overhaul Flowchart 10-4 Valve Sub-ass'y Repair/ Overhaul 10-8

VACUUM PUMP General Information 24x7 Complete Vacuum Pump and System Service Year Round Htc has established a well-rounded professional team based on the idea of "faster service, better quality and higher values." Htc pump service center has a complete line of decontamination, cleaning, drying, balancing, and vibration analysis equipment to minimize failures. The strict maintenance training provides the customers of semiconductor and FPD industries 24-hour on-call maintenance service. With professional technique, excellent quality of overhaul and our own vacuum components supply system make...

^^^P^ HIGHLIGHT TECH CORP. Turbo Molecular Pump HTC is an authorized agent and service center for EDWARDS turbo moelcular pump. For more than 10 years our service department has repaired most models of turbo molecular pumps, satisfying the rigorous demands of the semiconductor industry. Our extensive parts inventories, factory- trained technicians and fully equipped, environmentally safe facilities allow us to provide quality workmanship at fair price. Dimension in mm unless otherwise noted All information contained herein was current at time of publication, we reserve the right to change...

VACUUM PUMP HIGHLIGHT TECH CORP. High Throughput STP Turbomolecular Pump Range Advanced High -rsafr- High Flow Pump High Flow Full integrated Dimension in mm unless otherwise noted All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

^^^^^^ HIGHLIGHT TECH CORP. Dry Pump Overhaul Flowchart Semblance Examination Test Before Overhaul & El-check Check & Photo Spray Cleaning Idle Function Test Sand blasting Noise Test Vibration Test Test Running & Pressure Test Pressure Test Current Test Dimension in mm unless otherwise noted All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

^^B^P^ HIGHLIGHT TECH CORP. Repair Kits EBARA Dry Pump Repair kits-40.20 Parts Name Drive Shaft / Driven Shaft Timing Gear Bearing Housing Pressure Transducer Pressure Gauge ^^^^ Dimension in mm unless otherwise noted All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

^^H^^ HIGHLIGHT TECH CORP. Repair Kits EBARA Dry Pump Repair kits-A70W Parts Name BP Casing Top / Casing Bottom BP Drive Shaft / Driven Shaft DP Casing Top / Casing Bottom DP Drive Shaft / Driven Shaft Timing Gear Bearing Housing Pressure Transducer Pressure Gauge Water Flow Meter Dimension in mm unless otherwise noted All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

^^^^^ HIGHLIGHT TECH CORP. Repair Kits EBARA Dry Pump Repair kits-AA70 Parts Name Parts Name BP Drive Shaft / Driven Shaft 800323002030 2 DP Casing Top / Casing Bottom 800323001010 3 DP Drive Shaft / Driven Shaft 800323001030 5 Pressure Gauge Water Flow Meter Dimension in mm unless otherwise noted All Information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

^^B^^^ HIGHLIGHT TECH CORP. Valve Sub-ass'y Repair I Overhaul Htc can repair and overhaul for various brands of vacuum valves. We have the ability to fix or produce the damaged components and hardware, the complete overhaul process and standard operation procedure make your vacuum valves work well. The combination of high technology, high quality and high value is our core competency for all the products and service we provide. With years maintenance experience and reputation that Htc is your best choice. • Application Process • Facilities Supplier AMAT / TEL / Varian / LAM / EATON All...

J^JJ VACUUM PUMP ^^H^^^ HIGHLIGHT TECH CORP. Used Pump Htc has been selling and servicing vacuum pumps for more than fifteen years. We keep various used dry pumps in stock for different customers' need. The brands of used pumps are including Alcatel, EBARA, Kashiyama, TAIKO, ULVAC etc. The manufacturers specifications are met during inspection, assembly and test by our well-trained technicians. Dimension in mm unless otherwise noted All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without...

^^^^^^^^ www.high-light.com.tw - No. 106, Gung-Min South Road II, An-Nan Area, Tainan City 709 .Taiwan (R.O.C.) http://Www.high-light.com.tw Mail:ec@high-light.com.tw Sill Tainan Factory II No. 101 Gung-Min South Road 1, An-Nan Area, Tainan City 709 .Taiwan (R.O.C.) B*§^?P& (±.M) M&s] Shanghai. Highlight Tech Co., Ltd. No. 51, Cheng Yin Rd, Baoshan City Industrial Zone, Shanghai 200444, China http://www.high-light.com.cn Mail:ec@high-light.com.tw §T TJ M. IS JllA HSIN-CHU Technology Service Center No. 13, Zhonghua Road, Fengshan Village ,Hukou TownShip, Hsinchu County, 303,Taiwan (R.O.C.)