Accessories Series
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HIGHLIGHT TECH CORP. HIGHLIGHT TECH CORP. HIGHLIGHT TECH CORP. HIGHLIGHT TECH CORP. HIGHLIGHT TECH CORP.

Note : • All dimensions shown on this page are in inch • Material : 304 Stainless Steel.

Note : • All dimensions shown on this page are in mm. • Material : 304 Stainless Steel.

DIN Flange (Nominal Pressure 6) DIN Flange (Nominal Pressure 10) Note : • All dimensions shown on this page are in mm. • Material : 304 Stainless Steel.

Note : • All dimensions shown on this page are in mm. • Material : 304 Stainless Steel.

Note : • All dimensions shown on this page are in mm. • Material : 304 Stainless Steel.

Model No. ANTI SIZE

ANSI ASA Blank with O-ring

ANSI ASA Flange with O-ring Groove Model No. ANSI SIZE

Welding Bellows Parts We offer excellent welding bellows parts for semiconductor equipments such as CVD,sputter,etcher and implanter etc. • Semiconductor Equipments • Actuators / Pistons • Bean Lines • Couplings (Flexible) • Expansion (Torque) • Dampening Devices Joints • Feed Throughs • Fluid Shock Absorbers • Fuel Drains • Gate Valves • Kiss Seals • Leak Detectors • Mechanical Shaft Seals • Pressure Sensors • Pressure Switches • Pressure Transducers • Pumps / Compressors • Shielding Devices • Slit Valves • Temperature Sensors • Valve Stem Seals • Vibration Dampeners • Volume Compensators...

Sapphire viewport A sapphire viewport consists of a stainless steel flange, a bridge adaptor and a sapphire dielectric. Kovar is typically used as the material of bridge adaptor to form hermetic seals between SUS flange and sapphire dielectric. Besides, a prior surface metallization layer has to be applied on sapphire dielectric before it can be hermetically sealed with kovar adaptor by brazing. The metallization layer mainly contains Mo, Mn and Ni. Since both kovar and Ni are magnetic materials, they will distort spatial distribution of ambient magnetic field. This has to be taken into...

Sapphire viewport • Excellent Surface Finish : 20-10 Scratch-Dig • Broader Temperature & Transmission Range • High Trensparency &Wide Bandwidth • High Hardness • Customization Available Upon Request Window Material Flange Material Leak Rate Temperature Range Transmission rate/rang

www.high-light.com.tw www.high-light.com.tw

Window Material : Tempered glass

Magnetic Fluid Feedthrough Htc vacuum provides quality magnetic fluid rotary feedthroughs, which introduces rotary motion into vacuum environments. A magnetic fluid rotary feedthrough is composed of a non-magnetic housing, bearings, pole pieces, a permanent magnet, a magnetic shaft and ferrofluid. When ferrofluid is applied to the gap between the shaft and the pole pieces in a rotary feedthrough, it creates a magnetic field which functions like an O-ring in the gap. Magnetic fluid rotary feedthroughs can be used in ultra-high vacuum systems and other critical equipment in Semiconductor,...

Magnetic Fluid Feedthrough Vacuum range : up to 10-8 mbar Leak rate(He) : < 1011 mbar.l/sec (He) • Prevent magnetic fluid rotary feedthrough from dust and organic solvents (alcohol, acetone, Freon, etc.) • Do not load higher than 1 kg/cm2 in vacuum environment. • When the shaft of magnetic fluid rotary feedthrough is at rest, it is normal that the vacuum pressure may rise after the shaft starts working. The situation can be avoided through advanced startup. • For water cooling devices, the cooling water should be at 1-3kg/cm2 at room temperature. Besides, water can not be left in the inner...

Solid Shaft Sealed Spindles Degree vacuum pressure [mbar] : 10 8 Leakage rate(He) [mbar.l/sec] : < 10"11 Temperature range(°C) : 0~80°C (Adding water cooling structure if it is beyond this temperature range)

Semiconductor Sealed Spindles Degree vacuum pressure [mbar]: 10 8 Leakage rate(He) [mbar.l/sec] : < 10"11 Temperature range(°C) : 0~80°C (Adding water cooling structure if it is beyond this temperature range)

HIGHLIGHT TECH CORP. Single Axle(shaft) Non Flange Ferrofluld Feedthrough Degree vacuum pressure [Pa] : 10 6 All Information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

Nut Bush Ferrofluid Vacuum Seal Axle Feedthrough Degree vacuum pressure [Pa] : 10 6

Semiconductor Sealed Spindles Degree vacuum pressure [Pa] : 10

Semiconductor Sealed Spindles With Water Cooling Degree vacuum pressure [Pa] : 10-6

Hollow Axle Magnetic Fluid Feedthrough Degree vacuum pressure [Pa] : 10 6

Hollow Axle Flanged Ferrofluid Feedthrough Degree vacuum pressure [Pa] : 10 6

Hollow Axle Flanged Ferrofluid Feedthrough With Water Cooling Degree vacuum pressure [Pa] : 10 6

Molecular Sieve • The zeolite inside the tank trap the oil vapor that back stream toward the vacuum chamber from mechanical pump ' and trap other gases include water vapor from chamber toward the mechanical pump. • Sieve material : zeolite • Zeolite type : 13x1/8"(pellet size)

Molecular Sieve

Inline LN2 Cold Trap A cold trap is equipped at pumping line between chamber and pump. The cold trap can trap the volatile material to prevent they enter the mechanical pump and trap the oil from mechanical pump to prevent they enter the chamber. LN2 Fill & Vent Tube Flange Size Refill time table for single tube LN2 traps Trap diameter LN2 Volume Hours (inch) (liters)

^^^^^^^^ www.high-lighl.com.tw - No. 106, Gung-Min South Road II, An-Nan Area, Tainan City 709,Taiwan (R.O.C.) http://www.high-light.com.tw Mail:ec@high-light.com.tw □ SZIS Tainan Factory II No. 101 Gung-Min South Road 1, An-Nan Area, Tainan City 709,Taiwan (R.O.C.) BH«?£r& (£M) Shanghai. Highlight Tech Co., Ltd. No. 51, Cheng Yin Rd, Baoshan City Industrial Zone, Shanghai 200444, China http://www.high-light.com.cn Mail:ec@high-light.com.tw %\ n W. Wl M tp lHA HSIN-CHU Technology Service Center No. 13, Zhonghua Road, Fengshan Village ,Hukou TownShip, Hsinchu County, 303,Taiwan (R.O.C.)