Mass Spectrometers for Surface Analysis
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SURFACE ANALYSIS Mass Spectrometers

MASS SPECTROMETERS for Surface Analysis Hiden Analytical have been designing and developing the highest quality quadrupole mass spectrometer based systems for over 35 years. We have built a reputation for delivering instruments with superior sensitivity, accuracy and reproducibility together with a first class global service and applications support network. Hiden surface analysis products are available as complete systems, sub-assemblies and individual components. The products combine high performance and ease of use with unparalleled flexibility. Hiden can provide customisation for...

Contents SIMS INSTRUMENTS SIMS WORKSTATION SERIES – UHV Surface Analysis for Thin Film Depth Profiling FOUNDATION SIMS WORKSTATION SIMS WORKSTATION SIMS WORKSTATIONPLUS COMPACT SIMS – A Design Breakthrough in Surface Analysis AUTOSIMS – Automatic Surface Analysis System AutoSIMS SIMS COMPONENTS EQS – SIMS Detector PRIMARY ION SOURCES – Optimised for Surface Analysis IG20 – A 5 keV Caesium Ion Gun IG5C – A 5 keV Argon or Oxygen Ion Gun MAXIM – SIMS/SNMS Detector SOFTWARE – Control for SIMS EQS SIMS Spectrometer Signal intensity High depth resolution 1.8 nm layers Mass Spectrometers for Surfa

SIMS WORKSTATION SERIES UHV Surface Analysis for Thin Film Depth Profiling The SIMS Workstation is a family of instruments based around a large multi-function UHV chamber. The instrument is designed to be flexible, both in terms of function and cost, so features can be added or upgrades made as required. However, as a guide there are three standard configurations: Foundation SIMS Workstation SIMS Workstation SIMS WorkstationPlus The Foundation SIMS Workstation has the main chamber and IG20 argon/oxygen source together with the 9 mm MAXIM spectrometer, a simple manipulator and an electron...

COMPACT SIMS A Design Breakthrough in Surface Analysis Compact SIMS The Hiden Compact SIMS tool is designed for fast and reliable characterisation of layer structures, surface contamination and impurities with sensitive detection of positive ions being assisted by the oxygen primary ion beam and provides isotopic sensitivity across the entire periodic table. The ion gun geometry is chosen to provide nanometre depth resolution and near surface analysis. The instrument is self-contained requiring only a standard electrical outlet for operation. Although designed for routine lab use, the...

Automatic Surface Analysis System The AutoSIMS is built around the same source and analyser as the Compact SIMS but with the addition of a large sample holder and automated stage. This allows it to perform automated analysis batches, running 24/7 and potentially making hundreds of analyses per day. Of course, it can also be run in full manual mode where the precision of the stage and large sample area make it a very attractive instrument for the expert user. Capable of static and dynamic SIMS the AutoSIMS fits well in a busy production environment and its small footprint allows rapid...

SIMS Detector The Hiden EQS is a high transmission quadruple secondary ion mass spectrometry, SIMS, detector including a 45 degree electrostatic sector for simultaneous ion energy analysis. Ions are collected on the axis of the device with a low potential screened extraction field which makes it very popular for fitting as an after-market detector to a wide variety of surface analysis instrumentation. The EQS has been fitted to focussed ion beam (FIB) microscopes and XPS tools. The flight tube transfer lens system allows insertion lengths up to 750 mm to be achieved with high transmission...

IG5C - A 5 keV Caesium ion gun for UHV surface analysis applications The IG5C is a self-contained caesium ion gun designed for dynamic and static SIMS applications. The high brightness miniature surface ionisation source uses a safe caesium salt to generate an intense beam which is focussed via a two lens column onto the target. Thermal management of the source is an integrated feature of the Ion Gun Controller software allowing unattended starting and stopping, including ioniser regeneration at shutdown. With a minimum spot size of under 30 µm it makes an excellent ion gun for imaging....

IG20 - A 5 keV Argon or Oxygen ion gun for UHV surface analysis applications The IG20 is an easy to use gas ion gun with an electron impact ion source ideal for SIMS, Auger and XPS applications. Whilst most frequently used with oxygen (to enhance secondary ion emission for SIMS) the IG20 will produce beams of many gases, including all noble gases and even hydrogen. The gun features two independent, switchable, filaments so that analysis can continue even when one filament reaches the end of its life, typically in excess of 500 hours – replacement can then be made at the user’s convenience....

SIMS/SNMS Detector The MAXIM SIMS spectrometer provides high transmission in a compact unit designed specifically for routine materials analysis. A parallel plate energy filter is used to reject high energy ions that would affect mass resolution whilst permitting a wide bandwidth of optimally filtered ions to enter the triple filter quadrupole analyser – which can be either 6 or 9 mm pole diameter. The MAXIM extracts ions from 30 degrees below its inlet aperture thus it is mounted “off axis” which can be useful to free space beneath the sample. An electron impact ioniser is positioned at...

Control for SIMS All SIMS spectrometers can be run using the standard Hiden MASsoft software suite. This permits auto-tuning of the secondary column as well as collection of mass spectral, depth profile and diagnostic data. The SIMS Mapper software is an image based dedicated SIMS analysis tool. Depth profiles are collected as a stack of images from which local depth profiles and 3D reconstructions can be made after acquisition. By allowing gating after data acquisition, it is possible to maximise dynamic range and to choose to include or exclude specific features as well as to take...