Calcium Fluoride
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Calcium Fluoride VUV/DUV/UV, VIS and IR applications

Lithotec Calcium Fluoride Micro-lithography technologies ■Hellma Materials CryaalB standard The ccolormrtj btiIS aJducol vitIIi auSi repent Hits cofiftcaia a .aid Crom 2016-12-22 to201*-C«rtAcata ragistraAon no 41210852/3- Calcium fluoride single crystals, grown from high purity raw materials, are required for illumination and projection optics in 248 and 193 nm micro-lithography technologies. Hellma Materials' expertise allows fabrication of CaF2 blanks in diameters up to 440 mm and with a thickness exceeding 100 mm and highest transmission down to 157 nm. Key quality features...

Lithotec Crystals Typical dimensions PV @ 633 nm [nm/cm] * Bubbles, inclusions (ISO 10110-3] 1/1 x 0.063 (typical] 1C Litho: Excimer laser & beam delivery systems Typical dimensions disks: up to 100 mm diameter/30 mm thickness prisms: up to 100 mm edge length Characteristic parameters See table above: Litho manufacturing tools Laser durability Hellma Materials offers material with a laser durability up to highest requirements which is categorized by an internal classification method. In addition to volume characteristics, laser durability is also dependent on surface quality (with...

Properties of Calcium Fluoride Optical properties nd = 1.43384 ne = 1.43493 vd = 95.23 (+/- 0.2 %) ve = 94.69 (+/- 0.2 %) nF-nc = 0.00456 nF-- nc- = 0.00459 Deviation of relative partial dispersions from "Normal Line" APCI -0.1935 Refractive indices n(N2) Variation over (at 22 °C, nitrogen atmosphere, temperature Xvac = vacuum wavelength Tolerances of refractive indices: ±2 x 10*5 •* Measurement at NIST on 08-01-00. All refractive indices are interpolated from values measured under dry Nitrogen. Relative partial dispersion Ps.t 0.2698 Sellmeier dispersion formula for refractive...

Lithotec Crystals Chemical/electrical properties Solubility in water [g/lj 20 °C 0.016 Crystal type single crystal, synthetic Crystal structure cubic; CaF2 type structure Thermal properties Melting point [°C] 1420 Mean specific heat 854 X.,20«c) [W/(m-K)] Linear thermal expansion coefficient «(20 °c;30o«c|['0-6/K] 21.28 Chemical behavior of polished surfaces Climatic resistance class CR (ISO/WD 13384) Acid resistance class SR (ISO 8424) Alkali resistance class AR (ISO 10629) Phosphate resistance class PR • all values related to 11111 direction " Lit. 2

The very broad spectral transmission range of calcium fluoride from 130 nm to 9 pm (depending on sample thickness) makes it suitable for various applications in the ultraviolet, visible and infrared spectrum. Typical transmission characteristics may vary in dependence from crystal properties

Lithotec Crystals 1. H. Bach, N. Neuroth, "The Properties of Optical Glass", Springer, Berlin. 1995 2. J. H. Burnett, "Stress-optical coefficients of 157 nm materials", Sematech 157 nm Tech. Data Rev., Maryland, 2001 3. K. Knapp, E. Morsen. "CaF2 for 157 nm Lithography”, Sematech 157 nm Tech. Data Rev., Orlando. 2001 4. M. Letz, A. Engel, W. Mannstadt, L. Parthier, U. Natura, K. Knapp. "CaF2 for DUV lens fabrication: Basic material properties and dynamic light-matter interaction", SPIE Microlithography, Santa Clara, 2004 5. Ch. Mtihlig, W, Triebel, G. Topfer, A, Jordanov, "Calcium fluoride...

Hellma Materials GmbH Moritz-von-Rohr-StraRe 1 07745 Jena / Germany phone+ 49 3641 2877-0 fax + 49 3641 2877-200 info.materials@hellma.com www.hellma-materials.com For inquiries please contact our local Sales Representative North America For inquiries please contact our local Distributor Ms Judy Lim Hellma Asia Pte Ltd. phone + 65 6397 4138 fax + 65 6397 4139 United Kingdom Mr Coby Cohen Shoshic Technologies Ltd. phone + 972 77 9100 875 fax + 972 544 399 862 coby@stech.co.il 02/17 EN-1 Printed in Germany Subject to change without notice