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Si photodiodes S8552, S8553

Si photodiodes S8552, S8553
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Vacuum UV (VUV) monitoring photodiodes The S8552 and S8553 photodiodes have sensitivity in the vacuum UV region. They are specially suitable for excimer laser (ArF: 193 nm, KrF: 248 nm) monitoring. Their design optimized for use in the VUV region provides improved stability in sensitivity for VUV light irradiation compared to previous products. Improved reliability for excimer lasers (ArF: 193 nm, KrF: 248 nm) Vacuum UV monitor Excimer laser monitor Large photosensitive area S8552: 10 × 10 mm S8553: 18 × 18 mm Windowless package S8552: 16.5 × 15.0 mm ceramic package S8553: 25.5 × 25.5 mm ceramic package Absolute maximum ratings (Ta=25 °C) Parameter Reverse voltage Operating temperature* Storage temperature* Symbol VR max Topr Tstg * No dew condensation When there is a temperature difference between a product and the surrounding area in high humidity environment, dew condensation may occur on the product surface. Dew condensation on the product may cause deterioration in characteristics and reliability. Note: Exceeding the absolute maximum ratings even momentarily may cause a drop in product quality. Always be sure to use the product within the absolute maximum ratings. Electrical and optical characteristics (Ta=25 °C) Parameter Photosensitivity Dark current Terminal capacitance Rise time

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Spectral response Variation in sensitivity due to VUV exposure [Typ. Ta=25 °C, ArF excimer laser, 0.1 mJ/cm2/pulse, f=100 Hz, λ=193 nm, pulse width=15 ns (FWHM)] Relative sensitivity (%) 40 S1227/S1337 series (unsealed product) 20

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Dimensional outlines (unit: mm) S8552 White ceramic Anode terminal mark Photosensitive surface

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Handling precautions The S8551, S8552 and S8553 use windowless packages with no protection on the photodiode chip. Always use the following precautions when handling these photodiodes. · Handle the photodiodes in a clean room. · Never touch the photodiode chip surface and wire bonding. · Wear dust-proof gloves and dust-proof mask. · Use an air dust cleaner to blow away dust and foreign matter on the photodiode chip surface. · Do not clean the photodiodes by any method other than air blow. Precautions against UV light exposure ∙ When UV light irradiation is applied, the product...

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