Si photodiode MEMS mirror S13124-01 Miniature, high performance, linear mode Electromagnetically driven two-dimensional laser scanning MEMS mirror The S13124-01 is an electromagnetically driven mirror that incorporates our unique MEMS (micro-electro-mechanical systems) technology. The device was made smaller by arranging the magnet beneath the mirror. A two-dimensional scanning was achieved in linear mode. Electrical current flowing in the coil surrounding the mirror produces a Lorentz force based on Fleming’s rule that drives the mirror. Hamamatsu MEMS mirrors offer a wide optical deflection angle and high mirror reflectivity. Two-dimensional scanning in linear mode Capable of vector scanning and step operation Machine vision Laser material processing Low voltage drive: suitable for installation on equipment Various laser scan units Laser measurement With window material: Prevents foreign matter contamination Evaluation circuit available: C15087 (sold separately) Structure and principle In a MEMS mirror, a metallic coil is formed on a single-crystal silicon, a mirror is formed inside the coil through MEMS processing, and a magnet is arranged beneath the mirror. Within a magnetic field generated by the magnet, electrical current flowing in the coil surrounding the mirror produces a Lorentz force based on Fleming’s rule that causes the mirror to tilt. In addition, the mirror can be driven two-dimensionally with the combination of two springs formed by MEMS processing. The path of the laser light incident on the mirror surface is varied in this way to scan and project. Compared to the electrostatic or piezoelectric driven mirrors, electromagnetically driven MEMS mirrors are lower voltage driven and easier to use. Structure diagram Laser light Magnet Magnetic field KOTHC0058EB

MEMS mirror Absolute maximum ratings (Ta=25 °C unless otherwise noted) Parameter Optical deflection angle*1 First axis Drive current*2 Optical deflection angle*1 Second axis Drive current*2 Operating temperature*3 Storage temperature*3 Symbol θ1 max I1 θ2 max I2 Topr Tstg *1: Angle at which the torsional stress of the torsion bars becomes large and the service life is shortened *2: Using the mirror with only one side (positive or negative) of the optical deflection angle is not recommended, as it can shorten the service life. *3: Ambient temperature *4: When there is a temperature difference between...

MEMS mirror Definition of incident angle Electrical and optical characteristics (recommended operating conditions unless otherwise noted) Parameter Reflectance*10 Transmittance of window material*11 Coil resistance Resonant frequency Quality factor Coil resistance First axis Resonant frequency Quality factor Second axis Drive current Temperature Resistance sensor temperature coefficient *10: Using a white light source *11: Average window material transmittance of polarized light p and s. Note that, after passing through the window material, the laser light is reflected by the mirror and passes through...

MEMS mirror Optical deflection angle The optical deflection angle is twice the mechanical deflection angle. 8° (Optical deflection angle) 4° (Mechanical deflection angle) Effect of tilting the window material The S13124-01 is equipped with the window material in order to prevent foreign matter from adhering to the mirror section. The window material tilt (20° with respect to the first axis scanning direction) is set so that the laser light reflected from the front or rear surface of the window does not enter the mirror scanning projection range. Scan light Incident light Reflected light from the...

MEMS mirror Spectral transmittance of window material (Typ. Ta=25 °C, white light source, incident angle*=8°) Incident angle: 0° Incident angle: 30° Incident angle: 45° * Incident angle of light to the mirror Note: Incident angle =Angle of incidence of light on window material Optical deflection angle vs. drive current First axis Optical deflection angle (°) Optical deflection angle (°)

MEMS mirror Optical deflection angle vs. frequency First axis Second axis Optical deflection angle (°) Optical deflection angle (°) Range shown with broken line: Not usable Range shown with broken line: Not usable

MEMS mirror Dimensional outline (unit: mm) 33.5 ± 0.15 2.5 ± 0.1 Mirror surface Connection Temperature sensor (+) First axis coil (+) Second axis coil (+) First axis coil (-) Second axis coil (-) Temperature sensor

MEMS mirror Mechanical deflection direction of mirror due to drive current The direction of the mirror’s mechanical deection varies depending on the direction of the drive current owing through the coil as follows. Note: As the drive frequency of the MEMS mirror increases, the phase lag of the optical deection angle with respect to the drive current increases. First axis coil Second axis First axis Positive current applied to the first axis coil (pin ) No drive current Negative current applied to the first axis coil (pin ) No drive current Positive current applied to the second axis coil (pin...

MEMS mirror Precautions ∙ See "Metal, ceramic, plastic package products / Precautions." ∙ A powerful magnet is inside the product. Bringing a magnetic body close to the product may damage the product. Therefore, we recommend using nonmagnetic screws and screwdrivers when fixing the product in place. ∙ Do not use in a strong magnetic field environment. The operating characteristics of the product may degrade due to the magnetic field. ∙ When carrying several products together, prevent each product from making contact with each other due to the attraction force of magnets, such as by fixing the products...

MEMS mirror Evaluation circuit for MEMS mirror C15087 (sold separately) The C15087 is a circuit board designed to simply evaluate linear mode MEMS mirror (1D: S12237-03P, 2D: S13124-01). First axis or second axis (linear mode) is driven with the selection from triangular wave, sine wave, or any chosen wave. A USB 2.0 interface is used to set the driving conditions of the MEMS mirror from the PC. This product can be driven with USB bus power. Absolute maximum ratings Parameter Operating temperature Storage temperature Supply voltage Current consumption *14: When there is a temperature difference...